Flexure-hinges guided nano-stage for precision manipulations: Design, modeling and control

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• 作者：Peng-Bo Liu ; Peng Yan ; Zhen Zhang…
• 关键词：Piezoelectric driven nano ; stage ; Hysteresis nonlinearity ; Active Disturbance Rejection Control (ADRC) ; Extended State Observer (ESO)
• 刊名：International Journal of Precision Engineering and Manufacturing
• 出版年：2015
• 出版时间：October 2015
• 年：2015
• 卷：16
• 期：11
• 页码：2245-2254
• 全文大小：1,765 KB
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• 作者单位：Peng-Bo Liu (1)
  Peng Yan (1) (2)
  Zhen Zhang (3) (4)
  Tong-Tong Leng (1)
  
  1. Key Laboratory of High-efficiency and Clean Mechanical Manufacture, Ministry of Education, School of Mechanical Engineering, Shandong University, Jinan, Shandong, 250061, China
  2. School of Automation Science and Electrical Engineering, Beihang University, Beijing, 100191, China
  3. Department of Mechanical Engineering, Tsinghua University, Beijing, 100084, China
  4. Beijing Key Lab of Precision/Ultra-Precision Manufacturing Equipment and Control, Tsinghua University, Beijing, 100084, China
  
• 刊物类别：Engineering
• 刊物主题：Industrial and Production Engineering
  Materials Science
  
• 出版者：Korean Society for Precision Engineering, in co-publication with Springer Verlag GmbH
• ISSN：2005-4602

文摘

In this paper, a novel piezoelectric actuator driven nano-stage with bridge type mechanism is studied from the perspectives of design optimization, dynamical modeling, as well as controller synthesis for high precision manipulation purposes. FEM (Finite Element Method) analysis and dynamical modeling are provided to derive the system model including the hysteresis nonlinearity. Considering the complexities of dynamical uncertainties and hysteresis nonlinearity, an active disturbance rejection controller is developed consisting of extended state observer (ESO), state feedback controller and profile generator. With the proposed algorithm, the nonlinear dynamics, system uncertainties and external disturbances can be treated as part of the “total disturbances- such that the extended state observer can be used to estimate and suppress the effects of these complex dynamics. The proposed control algorithm is deployed in real time implementations on the designed nano-stage, where experimental results demonstrate good control performance in terms of high precision positioning, hysteresis compensation and disturbance rejection. Keywords Piezoelectric driven nano-stage Hysteresis nonlinearity Active Disturbance Rejection Control (ADRC) Extended State Observer (ESO)