OES and GC/MS Study of RF Plasma of Xylenes

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• 作者：Szetsen Lee ; Shiao-Jun Liu
• 关键词：Xylene ; Monomer ; Excimer ; GC/MS ; OES
• 刊名：Plasma Chemistry and Plasma Processing
• 出版年：2017
• 出版时间：January 2017
• 年：2017
• 卷：37
• 期：1
• 页码：149-158
• 全文大小：
• 刊物类别：Physics and Astronomy
• 刊物主题：Inorganic Chemistry; Classical Mechanics; Characterization and Evaluation of Materials; Mechanical Engineering;
• 出版者：Springer US
• ISSN：1572-8986
• 卷排序：37

文摘

The radio-frequency discharge of xylene isomers was monitored with optical emission spectroscopy (OES). It was found that the meta isomer showed relatively stronger excimer to monomer intensity ratio than the other two isomers. OES also indicates the formation of xylyl (methylbenzyl) radicals. The reaction products of low pressure xylene plasmas were analyzed by gas-chromatography mass spectrometry (GC/MS). It showed that the main composition of the reaction products was 1,2-di-p-tolylethane (DPTE), regardless the types of xylene isomers used. It is known that o- and m-xylyl radicals can undergo rearrangement and convert to p-xylyl radicals. Similar to the cases in benzene and toluene plasmas, the recombination reaction between two p-xylyl radicals is believed to be responsible for the formation of DPTE. Density functional theory calculations suggest that the direct conversion of xylene excimers to DPTE is unlikely.