Formation of carbon nanotubes on an amorphous Ni_{ass="a-plus-plus">25}Ta_{ass="a-plus-plus">58}N_{ass="a-plus-plus">17} alloy film by chemical vapor deposition

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• 作者：D. G. Gromov ; S. V. Dubkov ; A. A. Pavlov ; S. N. Skorik ; A. Yu. Trifonov&#8230
• 关键词：carbon nanotubes ; thin alloy film ; CVD ; catalyst ; low ; temperature synthesis
• 刊名：Semiconductors
• 出版年：2016
• 出版时间：December 2016
• 年：2016
• 卷：50
• 期：13
• 页码：1748-1752
• 全文大小：
• 刊物类别：Physics and Astronomy
• 刊物主题：Magnetism, Magnetic Materials; Physics, general;
• 出版者：Pleiades Publishing
• ISSN：1090-6479
• 卷排序：50

文摘

It is shown that it is possible to grow carbon nanotubes on the surface of an amorphous Ni–Ta–N metal alloy film with a low Ni content (~25 at %) by chemical deposition from acetylene at temperature 400–800°C. It is established that the addition of nitrogen into the Ni–Ta alloy composition is favorable for the formation of tantalum nitride and the expulsion of Ni clusters, which act as a catalyst of the growth of carbon nanotubes, onto the surface. From Raman spectroscopy studies, it is found that, as the temperature of synthesis is raised, the quality of nanotubes is improved.