The heuristic preemptive dispatching rule using stocker for conveyor-based material handling system of 450-mm wafer fabrication

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• 作者：Chia-Nan Wang ; Yueh-Hsiu Lee ; Hsien-Pin Hsu…
• 关键词：Automated material handling system ; 450 ; mm wafer fabrication ; Preemptive
• 刊名：The International Journal of Advanced Manufacturing Technology
• 出版年：2017
• 出版时间：February 2017
• 年：2017
• 卷：88
• 期：5-8
• 页码：2179-2189
• 全文大小：
• 刊物类别：Engineering
• 刊物主题：Industrial and Production Engineering; Media Management; Mechanical Engineering; Computer-Aided Engineering (CAD, CAE) and Design;
• 出版者：Springer London
• ISSN：1433-3015
• 卷排序：88

文摘

Transition from 300 to 450 mm wafer fabrication is the current trend in the semiconductor industry due to the benefits of higher productivity and lower production cost. However, the increased size and weight of 450 mm wafers will cause handling and transport problems, which prompts the need of an effective and capable automated material handling system (AMHS). Some researchers have proposed using conveyor-based AMHS as the next-generation transport means for 450 mm wafer fabrication. However, the lack of effective dispatching rules will make a conveyor-based AMHS to remain suffering traffic-jam problems and unable to prioritize lots to meet customer needs. In this research, a dispatching rule called “heuristic preemptive dispatching rule using stocker (HPDS)” is proposed to control wafer movements in a conveyor-based AMHS for 450-mm wafer fabrication. Simulation has been conducted and the results showed the HPDS outperformed the differentiated preemptive dispatching (DPD) in terms of average variable time that includes block and waiting times.