Estimation of Thickness and Cadmium Composition Distributions in HgCdTe Focal Plane Arrays

详细信息    查看全文

• 作者：S. Mouzali ; S. Lefebvre ; S. Rommeluère ; Y. Ferrec…
• 刊名：Journal of Electronic Materials
• 出版年：2016
• 出版时间：September 2016
• 年：2016
• 卷：45
• 期：9
• 页码：4607-4611
• 全文大小：1,617 KB
• 刊物类别：Chemistry and Materials Science
• 刊物主题：Chemistry
  Optical and Electronic Materials
  Characterization and Evaluation Materials
  Electronics, Microelectronics and Instrumentation
  Solid State Physics and Spectroscopy
  
• 出版者：Springer Boston
• ISSN：1543-186X
• 卷排序：45

文摘

Mercury cadmium telluride (HgCdTe) is one of the most commonly used material systems for infrared detection. The performance of infrared focal-plane arrays (IRFPAs) based on this material is limited by several noise sources. In this paper, we focus on the fixed pattern noise, which is related to disparities between the spectral responses of pixels. In our previous work, we showed that spectral nonuniformities in a HgCdTe IRFPA were caused by inhomogeneities of thickness and cadmium composition in the HgCdTe layer, using an optical description of the pixel structure. We propose to use this bidimensional dependence combined with experimental spectral responses to estimate disparities of thickness and cadmium composition in a specific HgCdTe-based IRFPA. The estimation methods and the resulting maps are presented, highlighting the accuracy of this nondestructive method.KeywordsHgCdTeIRFPAspectral responsefixed pattern noisecutoff wavelengthcadmium composition