Differential C⁴D sensor for conductive and non-conductive fluidic channel

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• 作者：Nguyen Dac Hai ; Vu Quoc Tuan ; Do Quang Loc ; Nguyen Hoang Hai…
• 刊名：Microsystem Technologies
• 出版年：2016
• 出版时间：October 2016
• 年：2016
• 卷：22
• 期：10
• 页码：2511-2520
• 全文大小：1,208 KB
• 刊物类别：Engineering
• 刊物主题：Electronics, Microelectronics and Instrumentation
  Nanotechnology
  Mechanical Engineering
  Operating Procedures and Materials Treatment
  
• 出版者：Springer Berlin / Heidelberg
• ISSN：1432-1858
• 卷排序：22

文摘

This paper presents a novel design of a differential C4D (DC4D) sensor based on three electrodes for both conductive and non-conductive fluidic channel. This structure consists of two single C4D with an applied carrier sinusoidal signal to the center electrode as the excitation electrode. The electrodes are directly bonded on the PCB with built-in differential amplifier and signal processing circuit in order to reduce the parasitic component and common noise. In the non-conductive fluidic channel, the output voltage and capacitance changes 214.39 mV and 14 fF, respectively when a 3.83 μl tin particle crosses an oil channel. In conductive fluidic channel, the output voltage and admittance change up to 300 mV and 0.07 μS for the movement of a 4.88 μl plastic particle through channel. Moreover, the voltage change of this sensor is linear relation with the volume of investigated particle. This sensor also allows measuring velocity of particle inside fluidic channel and resistivity of the conductive fluidic.