A lithographically-patterned, elastic multi-electrode array for surface stimulation of the spinal cord

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• 作者：Kathleen W. Meacham ; Richard J. Giuly ; Liang Guo ; Shawn Hochman and Stephen P. DeWeerth
• 关键词：Poly(dimethylsiloxane) ; Multi ; electrode array ; Neural prosthetic ; Spinal cord ; Neural interfacing ; Electrophysiology ; Surface stimulation ; Neural control ; Spinal cord injury
• 刊名：Biomedical Microdevices
• 出版年：2008
• 出版时间：April, 2008
• 年：2008
• 卷：10
• 期：2
• 页码：259-269
• 全文大小：489.0 KB
• 刊物类别：Engineering
• 刊物主题：Biomedical Engineering
  Biophysics and Biomedical Physics
  Nanotechnology
  Engineering Fluid Dynamics
  
• 出版者：Springer Netherlands
• ISSN：1572-8781

文摘

A new, scalable process for microfabrication of a silicone-based, elastic multi-electrode array (MEA) is presented. The device is constructed by spinning poly(dimethylsiloxane) (PDMS) silicone elastomer onto a glass slide, depositing and patterning gold to construct wires and electrodes, spinning on a second PDMS layer, and then micropatterning the second PDMS layer to expose electrode contacts. The micropatterning of PDMS involves a custom reactive ion etch (RIE) process that preserves the underlying gold thin film. Once completed, the device can be removed from the glass slide for conformal interfacing with neural tissue. Prototype MEAs feature electrodes smaller than those known to be reported on silicone substrate (60 μm diameter exposed electrode area) and were capable of selectively stimulating the surface of the in vitro isolated spinal cord of the juvenile rat. Stretchable serpentine traces were also incorporated into the functional PDMS-based MEA, and their implementation and testing is described.