Computational simulation for optimizing the thermal hyperfine patterning process and its experimental verification

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• 作者：Hyun-June Oh (1)
  Yong-Phil Jeon (1)
  Gyu-Wan Hwang (2)
  Chung-Gil Kang (3)
  
• 关键词：Thermal nanoindentation ; Poly(methyl methacrylate) (PMMA) ; Hyperfine pattern ; Pile ; up ; Elastic recovery
• 刊名：International Journal of Precision Engineering and Manufacturing
• 出版年：2014
• 出版时间：July 2014
• 年：2014
• 卷：15
• 期：7
• 页码：1397-1404
• 全文大小：2,628 KB
• 参考文献：1. Guo, L. J., “Recent Progress in Nanoimprint Technology and its Applications,-Journal of Physics D: Applied Physics, Vol. 37, No. 11, pp. R123–R141, 2004. CrossRef
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  11. Richeton, J., Ahzi, S., Vecchio, K., Jiang, F., and Makradi, A., “Modeling and Validation of the Large Deformation Inelastic Response of Amorphous Polymers over a Wide Range of Temperatures and Strain Rates,-International Journal of Solids and Structures, Vol. 44, No. 24, pp. 7938-954, 2007. CrossRef
  12. Gad-el-Hak, M., “The MEMS Handbook,-CRC Press, pp. I-–I-, 2001. CrossRef
  
• 作者单位：Hyun-June Oh (1)
  Yong-Phil Jeon (1)
  Gyu-Wan Hwang (2)
  Chung-Gil Kang (3)
  
  1. Precision Manufacturing System Division, Pusan National University, Jangjeon-dong, Geumjeon-gu, Busan, 609-735, South Korea
  2. Department of Mechanical Design, Kyungnam College of Information & Technolgy, 45 Jurye-ro, Sasang-gu, Busan, 617-701, South Korea
  3. School of Mechanical Engineering, Pusan National University, San 30, Changjeon-dong, Geumjeong-gu, Busan, 609-735, South Korea
  
• ISSN：2005-4602

文摘

Polymer for NanoImprint Lithograph (NIL) process has been developed as well as development of the process and equipment. It is significant to develop the investigation technique of thermal nano-indentation behavior and mechanical properties of polymer to fabricate high quality nanostructure by varying a variety of T(Thermal)-NIL process parameters. Necessity of database construction for material properties dependent on time at the room and elevated temperature has been growing because a NIL process has been widely used in industries. The D/B has been accumulated through many NIL simulation at room temperature. However, D/B construction at high temperature has not been performed. This paper demonstrates computational process for thermal nanoindenation by using ABAQUS to optimize hyper-fine patterning process through thermal nanoindentation. The experimental and numerical results are compared to validate the computational method. Therefore, PMMA was nanoindented under forming conditions which minimize the elastic recover and pile-up. Thermal nanoindentation experiments were conducted at the temperature between 110 and 150°C. Continuous Stiffness Measurement (CSM) was performed during thermal nanoindentation by using a nanoindenter and hot stage. The effect of the maximum indentation depth of 2000 nm on mechanical properties at glass transition temperature of PMMA was investigated.