Room-temperature NH3 sensors with high sensitivity and short response/recovery times

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• 作者：Qingcheng Liang (1)
  Di Li (1)
  Shang Gao (1)
  Dayong Jiang (1)
  Jianxun Zhao (1)
  Jieming Qin (1)
  Jianhua Hou (1)
  
• 关键词：Micro ; sensors ; Metal oxide semiconductors ; Ammonia ; In2O3 ; SnO2
• 刊名：Chinese Science Bulletin
• 出版年：2014
• 出版时间：February 2014
• 年：2014
• 卷：59
• 期：4
• 页码：447-451
• 全文大小：402 KB
• 作者单位：Qingcheng Liang (1)
  Di Li (1)
  Shang Gao (1)
  Dayong Jiang (1)
  Jianxun Zhao (1)
  Jieming Qin (1)
  Jianhua Hou (1)
  
  1. School of Materials Science and Engineering, Changchun University of Science and Technology, Changchun, 130022, China
  
• ISSN：1861-9541

文摘

Micro-sensors are fabricated by co-electrospinning In2O3 and SnO2 nanofibers on the substrates of SiO2/Si with interdigitated Pt signal electrodes. The total sensor area is 1.36?mm?×?0.55?mm and the active area is only 0.63?mm?×?0.55?mm. Excellent NH3 sensing properties are obtained based on the sensors at room temperature. The sensitivity is at most 28 when the sensors are exposed to NH3 of 10?ppm. The response time is 8?s or so and the recovery time is nearly 2?s. Not only fine selectivity, but also long-time stability is obtained. The results not only demonstrate the obtained micro-sensors are very promising devices for NH3 detection, but also show a possible route for large-scale NH3 sensor fabrication at the industrial level.