Effect of Surface Elastic on the Response of Microcantilevers Under Photothermal Excitation

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• 作者：Yaqin Song ; Jintao Bai ; Yongfeng Kang
• 关键词：Surface elastic modulus ; Microcantilever ; Photothermal
• 刊名：International Journal of Thermophysics
• 出版年：2015
• 出版时间：November 2015
• 年：2015
• 卷：36
• 期：10-11
• 页码：3106-3115
• 全文大小：565 KB
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• 作者单位：Yaqin Song (1)
  Jintao Bai (2)
  Yongfeng Kang (3)
  
  1. State Key Laboratory for Strength and Vibration of Mechanical structures, School of Aerospace, Xi’an Jiaotong University, Xi’an, 710049, People’s Republic of China
  2. National Key Laboratory of Photoelectric Technology and Functional Materials (Culture Base) and Shaanxi Provincial Key Laboratory of Photoelectronic Technology, Northwest University, Xi’an, 710069, Shaanxi, People’s Republic of China
  3. School of Electronic and Information Engineering, Xi’an Jiaotong University, Xi’an, 710049, People’s Republic of China
  
• 刊物类别：Physics and Astronomy
• 刊物主题：Physics
  Condensed Matter
  Mechanics
  Industrial Chemistry and Chemical Engineering
  Physical Chemistry
  
• 出版者：Springer Netherlands
• ISSN：1572-9567

文摘

Surface elasticity often plays a significant role in the physical properties of micro and nanosized materials and structures. In this paper the effect of surface elastic modulus on the bending of a microcantilever, which was excited with a frequency-modulated laser, is studied by incorporating the effect of the surface elastic modulus into the equation of motion. The deflection of microcantilever with surface elastic effect was obtained analytically and shown graphically. It was found that the surface elastic modulus had distinct effect on the deflection and resonance frequencies of microcantilever. The present study might be helpful for the design and application of microcantilever device.