Research on AOCTPN-based modeling and simulation technology of semiconductor fabrication line

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• 作者：Zhai Wenbin ; Chu Xuening ; Zhang Jie ; Ma Dengzhe ; Jin Ye and Yan Juanqi
• 关键词：AOCTPN Modeling and simulation ; Semiconductor fabrication line
• 刊名：The International Journal of Advanced Manufacturing Technology
• 出版年：2006
• 出版时间：April 2006
• 年：2006
• 卷：28
• 期：7-8
• 页码：814-821
• 全文大小：577 KB
• 刊物类别：Engineering
• 刊物主题：Industrial and Production Engineering
  Production and Logistics
  Mechanical Engineering
  Computer-Aided Engineering and Design
  
• 出版者：Springer London
• ISSN：1433-3015

文摘

There was a lack of modeling technology for the line fabrication of semiconductors under multi-agent-based scheduling and control status in quo. To resolve this problem, an AOCTPN modeling technology for a semiconductor fabrication line was proposed. The interior behavior of the machine agent was encapsulated and the hierarchical multi-agent-based semiconductor fabrication line model was separated into the system layer, the machine group layer, and the machine agent layer, which reduced the complexity and improved the reuse of the model. In addition, a distributed discrete event simulation platform was built to evaluate the performance of the multi-agent-based semiconductor fabrication line. An illustrative example of a 6-inch semiconductor fabrication line in Shanghai demonstrates the effectiveness of this approach .