Emission of charged and stable clusters during the ion sputtering of metal

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• 作者：V. I. Matveev ; S. N. Kapustin
• 刊名：Bulletin of the Russian Academy of Sciences: Physics
• 出版年：2016
• 出版时间：February 2016
• 年：2016
• 卷：80
• 期：2
• 页码：113-116
• 全文大小：317 KB
• 参考文献：1. Fundamental’nye i prikladnye aspekty raspyleniya tverdykh tel. Sb. statei (Fundamental and Applied Aspects of Sputtering of Solids: Collection of Articles), Mashkova, E.S., Ed., Moscow: Mir, 1989.
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  4. Sputtering by Particle Bombardment, III. C haracteristics of Sputtered Particles, Technical Applications, Behrisch, R. and Wittmaack, K., Eds., Springer-Verlag, 1991.
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• 作者单位：V. I. Matveev (1)
  S. N. Kapustin (1)
  
  1. Northern (Arctic) Federal University, Arkhangelsk, 163002, Russia
  
• 刊物类别：Physics and Astronomy
• 刊物主题：Physics
  Nuclear Physics, Heavy Ions and Hadrons
  Russian Library of Science
  
• 出版者：Allerton Press, Inc. distributed exclusively by Springer Science+Business Media LLC
• ISSN：1934-9432

文摘

A theory of the ion sputtering of metal in the form of excited neutral and charged clusters with their subsequent fragmentation to the stable state is developed. This theory is based on simple physical assumptions and agrees well with experiments. The results are presented in the form of practical formulas. The overall yields of stable neutral and charged clusters of silver, indium, and niobium are calculated as an example.