Approximation of the erosion zone profile in planar magnetrons with a disk cathode

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• 作者：A. V. Rogov ; Yu. V. Kapustin
• 刊名：Technical Physics
• 出版年：2016
• 出版时间：October 2016
• 年：2016
• 卷：61
• 期：10
• 页码：1584-1587
• 全文大小：235 KB
• 刊物类别：Physics and Astronomy
• 刊物主题：Physics
  Mechanics, Fluids and Thermodynamics
  Russian Library of Science
  
• 出版者：MAIK Nauka/Interperiodica distributed exclusively by Springer Science+Business Media LLC.
• ISSN：1090-6525
• 卷排序：61

文摘

We have proposed a universal approximation of the normalized erosion zone profile of planar magnetrons with a disk cathode by a composite function that includes the probability density function for the minimal distribution of extremal values for the region from the center of the disk cathode to the maximum of the erosion zone and the survival Weibull distribution function (from the maximum to the outer boundary of the sputtering zone). The accuracy of the approximation has been verified for six magnetrons differing in the cathode size or in the design of the magnetic systems. In all cases, good agreement has been observed between the approximation and experimentally measured values. The results reported here can be used to analyze processes that occur on the cathode during sputtering and to refine the calculations of coating profiles.