Fabrication and Analysis of Three-Layer All-Silicon Interference Optical Filter with Sub-Wavelength Structure toward High Performance Terahertz Optics

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• 作者：Hironobu Makitsubo ; Takehiko Wada…
• 关键词：Terahertz filter ; Silicon ; Sub ; wavelength structure ; Micro ; electro ; mechanical systems technology ; Rigorous coupled ; wave analysis
• 刊名：Journal of Infrared, Millimeter, and Terahertz Waves
• 出版年：2017
• 出版时间：February 2017
• 年：2017
• 卷：38
• 期：2
• 页码：206-214
• 全文大小：
• 刊物类别：Physics and Astronomy
• 刊物主题：Electrical Engineering; Electronics and Microelectronics, Instrumentation; Classical Electrodynamics;
• 出版者：Springer US
• ISSN：1866-6906
• 卷排序：38

文摘

We propose an all-silicon multi-layer interference filter composed solely of silicon with sub-wavelength structure (SWS) in order to realize high performance optical filters operating in the THz frequency region with robustness against cryogenic thermal cycling and mechanical damage. We demonstrate fabrication of a three-layer prototype using well-established common micro-electro-mechanical systems (MEMS) technologies as a first step toward developing practical filters. The measured transmittance of the three-layer filter agrees well with the theoretical transmittances calculated by a simple thin-film calculation with effective refractive indices as well as a rigorous coupled-wave analysis simulation. We experimentally show that SWS layers can work as homogeneous thin-film interference layers with effective refractive indices even if there are multiple SWS layers in a filter.