CMOS-compatible metal-stabilized nanostructured Si as anodes for lithium-ion microbatteries

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• 作者：Gibaek Lee (1) (2)
  Stefan L Schweizer (2)
  Ralf B Wehrspohn (1) (2)
  
  1. Fraunhofer Institute for Mechanics of Materials IWM ; Halle (Saale) ; 06120 ; Germany
  2. Department of Physics ; Martin-Luther University of Halle-Wittenberg ; Halle (Saale) ; 06099 ; Germany
  
• 关键词：1 ; D nanowires on black silicon ; Lithium ; ion batteries ; Electrochemical characterization ; Anode materials ; Metal coating
• 刊名：Nanoscale Research Letters
• 出版年：2014
• 出版时间：December 2014
• 年：2014
• 卷：9
• 期：1
• 全文大小：4,093 KB
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• 刊物主题：Nanotechnology; Nanotechnology and Microengineering; Nanoscale Science and Technology; Nanochemistry; Molecular Medicine;
• 出版者：Springer US
• ISSN：1556-276X

文摘

The properties of fully complementary metal-oxide semiconductor (CMOS)-compatible metal-coated nanostructured silicon anodes for Li-ion microbatteries have been studied. The one-dimensional nanowires on black silicon (nb-Si) were prepared by inductively coupled plasma (ICP) etching and the metal (Au and Cu) coatings by successive magnetron sputtering technique. The Cu-coated nb-Si show the most promising electrochemical performance enhancements for the initial specific capacity as well as their cyclability compared to pristine nb-Si. The electrochemical and microstructural properties before and after cycling of the metal-coated nb-Si compared to their pristine counterparts are discussed in detail.