文摘
This work presents a comprehensive study on the cycling effects on morphological, nanomechanical, and interfacial properties of sputtered TiO2 anode film during discharge/charge cycling. TiO2 film mechanically fails due to the repeated volume change and related generation/relaxation of stress induced by electrochemical phase transformation. The induced stress intensifies the initiation/propagation of cracks, also the interfacial delamination. Both morphology and mechanical property changes have harmful effects on the electrical contact, resulting in the battery aging. This paper also demonstrates that the experiment and analysis method is effective to characterize the interfacial reliability within thin film microbatteries.