Effect of VI/II gas ratio on the properties of MOCVD grown ZnO nanostructures

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• 作者：Sumati Pati
• 刊名：Journal of Materials Science: Materials in Electronics
• 出版年：2017
• 出版时间：January 2017
• 年：2017
• 卷：28
• 期：2
• 页码：1756-1761
• 全文大小：
• 刊物类别：Chemistry and Materials Science
• 刊物主题：Optical and Electronic Materials; Characterization and Evaluation of Materials;
• 出版者：Springer US
• ISSN：1573-482X
• 卷排序：28

文摘

In the present work, various nanostructures of zinc oxide were grown on quartz substrates using metal organic chemical vapor deposition technique. The growth was carried out at 450 °C and at atmospheric pressure using diethyl zinc and tert-butanol as zinc (group II) and oxygen (group VI) sources, respectively. The VI/II gas ratio was varied by varying the diethyl zinc flow rates from 20 to 35 sccm, and keeping the flow rate of t-butanol fixed at 60 sccm. Effects of this VI/II gas ratio on the structural, micro structural and optical properties of the zinc oxide nanostructures were discussed and a possible growth mechanism explaining the micro structural transition was proposed. At low diethyl zinc flow rate the grains were oriented along the c-axis, while higher flow rate of diethyl zinc promoted three dimensional growths resulting in sheet-like structures. The significant effects of variation of VI/II gas ratio on the micro structure of zinc oxide could be understood from the formation of various nanostructures including grain-like and sheet-like structures.