Laser printing of multi-layered polymer/metal heterostructures for electronic and MEMS devices

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• 作者：Andrew J. Birnbaum ; Heungsoo Kim ; Nicholas A. Charipar and Alberto Piqu¨¦
• 刊名：Applied Physics A: Materials Science & Processing
• 出版年：2010
• 出版时间：June, 2010
• 年：2010
• 卷：99
• 期：4
• 页码：711-716
• 全文大小：1.2 MB

文摘

A laser forward transfer technique for the simultaneous printing of polymer/metal stacked micro-laminates is introduced. Several different material combinations as well as stacking architectures are presented including single laser pulse deposited dual layer capacitors, three-layer stacks for potentially printing organic thin-film transistors (OTFTs), and photo-definable polymer/metal laminates and free-standing membranes for MEMS based sensors.