Energetic ion bombardment of Ag surfaces by C 60 + and Ga+ projectiles
详细信息 查看全文
- 作者：Shixin Sun (1)
Christopher Szakal (1)
Nicholas Winograd (1)
Andreas Wucher (2) - 刊名：Journal of The American Society for Mass Spectrometry
- 出版年：2005
- 出版时间：October 2005
- 年：2005
- 卷：16
- 期：10
- 页码：1677-1686
- 全文大小：495KB
- 参考文献：1. Castner, D. G. Surface science鈥擵iew from the edge. / Nature 2003, / 422, 129鈥?30. CrossRef
2. Winograd, N. The magic of cluster SIMS. / Anal. Chem. 2005, / 77, 142A-149A. CrossRef
3. Weibel, D.; Wong, S.; Lockyer, N.; Blenkinsopp, P.; Hill, R.; Vickerman, J. C. A C60 primary ion beam system for time of flight secondary ion mass spectrometry: Its development and secondary ion yield characteristics. / Anal. Chem. 2003, / 75, 1754鈥?764. CrossRef
4. Wong, S. C.; Hill, R.; Blenkinsopp, P.; Lockyer, N. P.; Weibel, D. E.; Vickerman, J. C. Development of a C-60(+) ion gun for static SIMS and chemical imaging. / Appl. Surf. Sci. 2003, / 203, 219鈥?22. CrossRef
5. Davies, N.; Weibel, D. E.; Blenkinsopp, P.; Lockyer, N.; Hill, R.; Vickerman, J. C. Development and experimental application of a gold liquid metal ion source. / Appl. Surf. Sci. 2003, / 203, 223鈥?27. CrossRef
6. Kersting, R.; Hagenhoff, B.; Kollmer, F.; Mollers, R.; Niehuis, E. Influence of primary ion bombardment conditions on the emission of molecular secondary ions. / Appl. Surf. Sci. 2004, / 231/232, 261鈥?64. CrossRef
7. Cornett, D. S.; Lee, T. D.; Mahoney, J. F. Matrix-free desorption of biomolecules using massive cluster-impact. / Rapid Commun. Mass Spectrom. 1994, / 8, 996鈥?000. CrossRef
8. Wagner, M. S. Impact energy dependence of SF5卤 induced damage in poly(methyl methacrylate) studied using time-of-flight secondary ion mass spectrometry. / Anal. Chem. 2004, / 76, 1264鈥?272. CrossRef
9. Mahoney, C. M.; Roberson, S.; Gillen, G. Depth profiling of 4-acetamindophenol-doped poly(lactic acid) films using cluster secondary ion mass spectrometry. / Anal. Chem. 2004, / 76, 3199鈥?207. CrossRef
10. Gillen, G.; Fahey, A. Secondary ion mass spectrometry using cluster primary ion beams. / Appl. Surf. Sci. 2003, / 203/204, 209鈥?13. CrossRef
11. Wucher, A.; Sun, S.; Szakal, C.; Winograd, N. Molecular depth profiling of histamine in ice using a buckminsterfullerene probe. / Anal. Chem. 2004, / 76, 7234鈥?242. CrossRef
12. Sostarecz, A. G.; Sun, S.; Szakal, C.; Wucher, A.; Winograd, N. Depth profiling studies of multilayer films with a C60+ ion source. / Appl. Surf. Sci. 2004, / 231/232, 179鈥?82. CrossRef
13. Sun, S.; Wucher, A.; Szakal, C.; Winograd, N. Depth profiling of polycrystalline multilayers using a buckminsterfullerene projectile. / Appl. Phys. Lett. 2004, / 84, 5177鈥?179. CrossRef
14. Sun, S.; Szakal, C.; Roll, T.; Mazarov, P.; Wucher, A.; Winograd, N. The use of C60 cluster projectiles for sputter depth profiling of polycrystalline metals. / Surf. Interface Anal. 2004, / 36, 1367鈥?372. CrossRef
15. Wucher, A.; Sun, S.; Szakal, C.; Winograd, N. Molecular depth profiling in ice matrices using C60 projectiles. / Appl. Surf. Sci. 2004, / 231/232, 68鈥?1. CrossRef
16. Szakal, C.; Sun, S.; Wucher, A.; Winograd, N. C60 molecular depth profiling of a model polymer. / Appl. Surf. Sci. 2004, / 231/232, 183鈥?85. CrossRef
17. Sostarecz, A. G.; McQuaw, C. M.; Wucher, A.; Winograd, N. Depth profiling of Langmuir-Blodgett films with a buckminsterfullerene probe. / Anal. Chem. 2004, / 76, 6651鈥?658. CrossRef
18. Ghalab, S.; Staudt, C.; Maksimov, S. E.; Mazarov, P.; Tugushev, V. I.; Dzhemilev, N. K.; Wucher, A. Formation of sputtered silver clusters under bombardment with SF5+ ions. / Nucl. Instrum. Methods B 2002, / 197, 43鈥?8. CrossRef
19. Samartsev, A. V., Wucher, A. Sputtering of indium using Aum projectiles: Transition from linear cascade to spike regime; unpublished.
20. Andersen, H. H. Nonlinear effects in collisional sputtering under cluster impact. In / Fundamental processes in sputtering of atoms and molecules (SPUT 92), 43 ed. Sigmund, P., Ed.; Det Kongelige Danske Videnskabernes Selskab: Copenhagen, 1993; p 127.
21. Postawa, Z.; Czerwinsky, B.; Szewczyk, M.; Smiley, E. J.; Winograd, N.; Garrison, B. J. Microscopic insights into the sputtering of Ag{111} induced by C60 and Ga bombardment. / J. Phys. Chem. B 2004, / 1, 7831鈥?837. CrossRef
22. Postawa, Z.; Czerwinski, B.; Szewczyk, M.; Smiley, E. J.; Winograd, N.; Garrison, B. J. Enhancement of sputtering yields due to C-60 versus Ga bombardment of Ag{111} as explored by molecular dynamics simulations. / Anal. Chem. 2003, / 75, 4402鈥?407. CrossRef
23. Kerford, M.; Webb, R. P. Molecular dynamics simulation of the desorption of molecules by energetic fullerene impacts on graphite and diamond surfaces. / Nucl. Instrum. Methods B 1999, / 153, 270鈥?74. CrossRef
24. Aoki, T.; Seki, T.; Matsuo, J.; Insepov, Z.; Yamada, I. Molecular dynamics simulation of a carbon cluster ion impacting on a carbon surface. / Mater. Chem. Phys. 1998, / 54, 139鈥?42. CrossRef
25. Seki, T.; Aoki, T.; Tanomura, M.; Matsuo, J.; Yamada, I. Energy dependence of a single trace created by C-60 ion impact. / Mater. Chem. Phys. 1998, / 54, 143鈥?46. CrossRef
26. Aderjan, R.; Urbassek, H. M. Molecular-dynamics study of craters formed by energetic Cu cluster impact on Cu. / Nucl. Instrum. Methods B 2000, / 164/165, 697鈥?04. CrossRef
27. Webb, R.; Kerford, M.; Way, A.; Wilson, I. Comparison of gold and carbon cluster impacts on graphite using molecular dynamics simulation. / Nucl. Instrum. Methods B 1999, / 153, 284鈥?91. CrossRef
28. Braun, R. M.; Blenkinsopp, P.; Mullock, S. J.; Corlett, C.; Willey, K. F.; Vickerman, J. C.; Winograd, N. Performance characteristics of a chemical imaging time-of-flight mass spectrometer. / Rapid Commun. Mass Spectrom. 1998, / 12, 1246鈥?252. CrossRef
29. Matt, S.; Dunser, B.; Lezius, M.; Deutsch, H.; Becker, K.; Stamatovic, A.; Scheier, P.; Mark, T. D. Absolute partial and total cross-section functions for the electron impact ionization of C-60 and C-70. / J. Chem. Phys. 1996, / 105, 1880鈥?896. CrossRef
30. Brummel, C. L.; Willey, K. F.; Vickerman, J. C.; Winograd, N. Ion beam induced desorption with postionization using high repetition femtosecond lasers. / Int. J. Mass Spectrom. Ion Processes 1995, / 143, 257鈥?70. CrossRef
31. Willey, K. F.; Brummel, C. L.; Winograd, N. Photoionization mechanisms for Cr(CO)6 using high intensity laser pulses in the near-IR. / Chem. Phys. Lett. 1997, / 267, 359鈥?64. CrossRef
32. Wucher, A.; Wahl, M.; Oechsner, H. Sputtered neutral silver clusters up to Ag18. / Nucl. Instrum. Methods B 1993, / 82, 337鈥?46. CrossRef
33. Sauerbrey, G. / Zeitschrift f眉r Physikalische Chemie 1959, / 155, 206鈥?22.
34. Kanazawa, K. K.; Melroy, O. R. The quartz resonator: Electrochemical applications. / IBM J. Res. Dev. 1993, / 37, 157鈥?71. CrossRef
35. Martin, B. A.; Hager, H. E. Velocity profile on quartz crystals oscillating in liquids. / J. Appl. Phys. 1989, / 65, 2630鈥?635. CrossRef
36. Doemling, M. F.; Lin, B.; Rueger, N. R.; Oehrlein, G. S.; Haring, R.; Lee, Y. H. Using a quartz crystal microbalance for low energy ion beam etching studies. / J. Vac. Sci. Technol. A 2000, / 18, 232鈥?36. CrossRef
37. Preliminary data acquired by ULVAC-PHI Inc. using 10-keV C60+ projectiles; http://www.phi.com
38. Yu, M. L. Charged and excited states of sputtered atoms. In / Sputtering by particle bombardment, III ; Behrisch, R.; Wittmaack, K., Eds.; Springer: Berlin, 1991; p 91.
39. Meyer, S.; Staudt, C.; Wucher, A. Ionization probability of atoms and molecules sputtered from a cesium covered silver surface. / Appl. Surf. Sci. 2003, / 203鈥?04, 48鈥?1. CrossRef
40. Wucher, A.; Heinrich, R.; Staudt, C. A method for quantitative determination of secondary ion formation probabilities. In / Secondary ion mass spectrometry (SIMS XII); Benninghoven, A.; Bertrand, P.; Migeon, N.; Werner, H. W., Eds.; Elsevier Science: Amsterdam, 2000; p 143.
41. Wahl, M.; Wucher, A. VUV photoionization of sputtered neutral silver clusters. / Nucl. Instrum. Methods B 1994, / 94, 36鈥?6. CrossRef
42. Wucher A.; Berthold W.; Oechsner, H. In / The charge state of sputtered metal clusters; Benninghoven, A.; Nihei, Y.; Shimizu, R.; Werner, H. W.; Eds.; Wiley and Sons: 1994; p 100.
43. Franzreb, K.; Fine, J. The significance of autoionization processes during nonresonant one-color two-photon ionization of neutral silver and copper atoms at 位 = 248 nm. / Nucl. Instrum. Methods B 1993, / 83, 266鈥?74. CrossRef
44. Szymonski, M.; Bhattacharya, R. S.; Overeijnder, H.; de Vries, A. E. Sputtering of an AgAu alloy by bombardment with 6 keV Xe+ ions. / J. Phys. D 1978, / 11, 751鈥?59. CrossRef
45. Sigmund, P.; Claussen, C. Sputtering from elastic-collision spikes in heavy-ion-bombarded metals. / J. Appl. Phys. 1981, / 52, 990鈥?93. CrossRef
46. Bernhardt, F.; Oechsner, H.; Stumpe, E. Energy distributions of neutral atoms and molecules sputtered from polycrystalline silver. / Nucl. Instrum. Methods B 1976, / 132, 329鈥?34. CrossRef
47. Dembowski, J.; Oechsner, H.; Yamamura, Y.; Urbassek, H. M. Energy distributions of neutral atoms sputtered from Cu, V, and Nb under different bombardment and ejection angles. / Nucl. Instrum. Methods B 1987, / 18, 464鈥?70. CrossRef
48. Brizzolara, R. A.; Cooper, C. B. Measurements of energy distributions and yields of neutral Cu2 and Cu3 species sputtered from Cu by low energy Ar+ ions. / Nucl. Instrum. Methods B 1989, / 43, 136鈥?45. CrossRef
49. Cooper, C. B.; Hamed, H. A. Experiments on the sputtering of neutral Cu2 dimers from Cu by Ar+ ions (60鈥?00 eV). / Surf. Sci. 1984, / 143, 215鈥?22. CrossRef
50. Coon, S. R.; Calaway, W. F.; Burnett, J. W.; Pellin, M. J.; Gruen, D. M.; Spiegel, D. R.; White, J. M. Yields and kinetic energy distributions of sputtered neutral copper clusters. / Surf. Sci. 1991, / 259, 275鈥?87. CrossRef
51. Waldeer, K. T.; Urbassek, H. M. keV-Atom bombardment of condensed rate gases: Molecular dynamics simulation. / Nucl. Instrum. Methods B 1993, / 73, 14鈥?8. CrossRef
52. Urbassek, H. M.; Waldeer, K. T. Spikes in condensed rate gases induced by keV-atom bombardment. / Phys. Rev. Lett. 1991, / 67, 105鈥?08. CrossRef
53. Urbassek, H. M. On rovibrational excitation in the sputtering of molecules: A quantum mechanical description. / J. Phys. B 1987, / 20, 3105鈥?123. CrossRef - 作者单位：Shixin Sun (1)
Christopher Szakal (1)
Nicholas Winograd (1)
Andreas Wucher (2)
1. Department of Chemistry, Pennsylvania State University, 104 Chemistry Building, 16802, University Park, PA, USA
2. Physics Department, University of Duisburg-Essen, Essen, Germany
文摘
The ion bombardment-induced release of particles from a metal surface is investigated using energetic fullerene cluster ions as projectiles. The total sputter yield as well as partial yields of neutral and charged monomers and clusters leaving the surface are measured and compared with corresponding data obtained with atomic projectile ions of similar impact kinetic energy. It is found that all yields are enhanced by about one order of magnitude under bombardment with the C 60 + cluster projectiles compared with Ga+ ions. In contrast, the electronic excitation processes determining the secondary ion formation probability are unaffected. The kinetic energy spectra of sputtered particles exhibit characteristic differences which reflect the largely different nature of the sputtering process for both types of projectiles. In particular, it is found that under C 60 + impact (1) the energy spectrum of sputtered atoms peaks at significantly lower kinetic energies than for Ga+ bombardment and (2) the velocity spectra of monomers and dimers are virtually identical, a finding which is in pronounced contrast to all published data obtained for atomic projectiles. The experimental findings are in reasonable agreement with recent molecular dynamics simulations.