Investigation of machining accuracy of micro-dimples fabricated by modified microscale pattern transfer without photolithography of substrates

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• 作者：Xifang Zhang ; Ningsong Qu ; Hansong Li…
• 关键词：Electrochemical micromachining ; Micro ; dimples ; Machining accuracy
• 刊名：The International Journal of Advanced Manufacturing Technology
• 出版年：2015
• 出版时间：December 2015
• 年：2015
• 卷：81
• 期：9-12
• 页码：1475-1485
• 全文大小：3,053 KB
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• 作者单位：Xifang Zhang (1)
  Ningsong Qu (1) (2)
  Hansong Li (1) (2)
  Zhengyang Xu (1)
  
  1. College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing, 210016, China
  2. Jiangsu Key Laboratory of Precision and Micro-Manufacturing Technology, Nanjing, 210016, China
  
• 刊物类别：Engineering
• 刊物主题：Industrial and Production Engineering
  Production and Logistics
  Mechanical Engineering
  Computer-Aided Engineering and Design
  
• 出版者：Springer London
• ISSN：1433-3015

文摘

Micro-dimples are among the basic microfeatures that have been applied to different products in various fields. The product performance and service life of textured surfaces are directly affected by size, location, and density. A modified microscale pattern transfer process without photolithography of substrates, through the use of movable dry-film mask electrochemical micromachining, has been proposed for the production of micro-dimples. This paper investigates the influence of electrochemical micromachining parameters, namely, applied voltage and machining time on the machining accuracy of micro-dimples produced using this technique. Experimental results indicate that the machining accuracy deteriorates with prolonged machining time and increasing applied voltage. It is found that to obtain high machining accuracy when machining micro-dimples of similar depth, a combination of higher current density with reduced machining time is recommended. Keywords Electrochemical micromachining Micro-dimples Machining accuracy