Effects of cavity size and density on polymer micro hot embossing

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• 作者：Xiang Zhang ; Ge Fang ; Tengjiao Jiang…
• 关键词：PMMA ; Micro hot embossing ; Picoseconds laser ; Cavity density ; Micro mold
• 刊名：International Journal of Precision Engineering and Manufacturing
• 出版年：2015
• 出版时间：October 2015
• 年：2015
• 卷：16
• 期：11
• 页码：2339-2346
• 全文大小：1,221 KB
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  23.Lee, C. H. and Kobayashi,
• 作者单位：Xiang Zhang (1) (2) (3)
  Ge Fang (1) (2) (3)
  Tengjiao Jiang (1)
  Na Zhao (2) (3)
  Junfeng Li (1) (2) (3)
  Bowen Dun (1) (2) (3)
  Qian Li (1) (2) (3)
  
  1. School of Mechanics & Engineering Science, Zhengzhou University, Zhengzhou, 450-001, China
  2. National Center for International Joint Research of Micro-Nano Molding Technology, Zhengzhou University, Zhengzhou, 450-001, China
  3. Key Laboratory for Micro Molding Technology of Henan Province, Zhengzhou University, Zhengzhou, 450-001, China
  
• 刊物类别：Engineering
• 刊物主题：Industrial and Production Engineering
  Materials Science
  
• 出版者：Korean Society for Precision Engineering, in co-publication with Springer Verlag GmbH
• ISSN：2005-4602

文摘

We designed nine micro molds with various cavity geometric parameters to investigate their effects on micropillars replication of the amorphous polymer via micro hot embossing. Picoseconds laser was used to fabricate the micro holes array on the stainless steel plates with 200 μm thickness as micro molds. The mechanical behavior of PMMA above glass transition temperature was investigated by uniaxial compression tests at various temperatures and strain rates, the results were used in simulation as constitutive relation. Confocal microscope and optical microscope showed that the replication height has a complicate nonlinear relationship with cavity size and density. DEFORM 3D was used to model and simulate the embossing process, and it is a good approach to investigate the micropallars replication heights, front angles and filling ratios. Keywords PMMA Micro hot embossing Picoseconds laser Cavity density Micro mold