文摘
Thin films of amorphous and crystalline perovskite Li3xLa(2/3)?xTiO3 (LLT) (x?=?0.117) are prepared by means of aqueous chemical solution deposition onto rutile TiO2 thin films as an anode, yielding an electrochemical half-cell. The Li-ion conductivity of the pin-hole free, amorphous LLT thin film (90?nm thick) is 3.8?×?10??S?cm? on Pt and 1.3?×?10??S?cm? on rutile TiO2, while measuring perpendicular to the thin film direction with impedance spectroscopy. Grazing angle attenuated total reflectance-Fourier transform infrared spectroscopy shows that all organic precursor molecules have been decomposed at 500?°C. In addition, in situ (heating) X-ray diffraction analysis shows that phase pure crystalline perovskite LLT (x?=?0.117) is formed on top of the rutile TiO2 anode at 700?°C. Furthermore, thickness control is possible by varying the precursor solution concentration and the number of deposition cycles. The current study presents a promising synthesis route to develop all-solid-state battery devices based on multi-metal oxide materials using aqueous precursor chemistry.