Using the differential method of measurement to control the accuracy of precision angle measuring structures
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- 作者：V. P. Kiryanov ; A. V. Kiryanov…
- 关键词：angle measuring structures ; differential method of measurement ; angle encoder ; air bearing ; angle measuring setup
- 刊名：Optoelectronics, Instrumentation and Data Processing
- 出版年：2016
- 出版时间：July 2016
- 年：2016
- 卷：52
- 期：4
- 页码：354-359
- 全文大小：216 KB
- 刊物主题：Optics, Optoelectronics, Plasmonics and Optical Devices;
- 出版者：Springer US
- ISSN：1934-7944
- 卷排序：52
文摘
Specific features of monitoring metrological parameters of optical scales, limbs, or code disks are considered. A concept of building an intelligent mechatronic module on the air bearing basis for a high-performance angle measuring machine is proposed. The result is achieved by using the differential method of measurement in the mechatronic module design. This method allows one to determine the contribution of the measuring setup to the resulting error of structures.