Subwavelength gratings on a free-standing HfO2 membrane for out-of-plane coupling of visible light
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- 作者：Qifa Liu ; Wei Wang ; Tongliang Sa ; Shumin He ; Xin Li ; Gangyi Zhu…
- 刊名：Applied Physics B: Lasers and Optics
- 出版年：2015
- 出版时间：December 2015
- 年：2015
- 卷：121
- 期：3
- 页码：353-361
- 全文大小：1,299 KB
- 参考文献：1.D. Taillaert, W. Bogaerts, P. Dumon, D. Van Thourhout, R. Baets, Bridging the gap between nanophotonic waveguide circuits and single mode optical fibers using diffractive grating structures. J. Nanosci. Nanotechnol. 10(3), 1551–1562 (2010)CrossRef
2.A.Z. Subramanian, S. Selvaraja, P. Verheyen, A. Dhakal, K. Komorowska, R. Baets, Near-infrared grating couplers for silicon nitride photonic wires. IEEE Photonics Technol. Lett. 24(19), 1700–1703 (2012)CrossRef ADS
3.Z. Xiao, T.-Y. Liow, J. Zhang, P. Shum, F. Luan, Bandwidth analysis of waveguide grating coupler. Opt. Express 21(5), 5688–5700 (2013)CrossRef ADS
4.F. Van Laere, G. Roelkens, M. Ayre, J. Schrauwen, D. Taillaert, D. Van Thourhout, T.F. Krauss, R. Baets, Compact and highly efficient grating couplers between optical fiber and nanophotonic waveguides. J. Lightwave Technol. 25(1), 151–156 (2007)CrossRef ADS
5.D. Taillaert, P. Bienstman, R. Baets, Compact efficient broadband grating coupler for silicon-on-insulator waveguides. Opt. Lett. 29(23), 2749–2751 (2004)CrossRef ADS
6.M. Antelius, K.B. Gylfason, H. Sohlstrom, An apodized SOI waveguide-to-fiber surface grating coupler for single lithography silicon photonics. Opt. Express 19(4), 3592–3598 (2011)CrossRef ADS
7.S. Ghosh, C.R. Doerr, G. Piazza, Aluminum nitride grating couplers. Appl. Opt. 51(17), 3763–3767 (2012)CrossRef ADS
8.C.R. Doerr, L. Chen, Y.-K. Chen, L.L. Buhl, Wide bandwidth silicon nitride grating coupler. IEEE Photonics Technol. Lett. 22(19), 1461–1463 (2010)CrossRef ADS
9.J. Leuthold, C. Koos, W. Freude, L. Alloatti, R. Palmer, D. Korn, J. Pfeifle, M. Lauermann, R. Dinu, S. Wehrli, M. Jazbinsek, P. Günter, M. Waldow, T. Wahlbrink, J. Bolten, H. Kurz, M. Fournier, J. Fedeli, H. Yu, W. Bogaerts, Silicon–organic hybrid electro-optical devices. IEEE J. Sel. Top. Quantum Electron. 19(6), 3401413 (2013)CrossRef
10.S. Romero-García, F. Merget, F. Zhong, H. Finkelstein, J. Witzens, Silicon nitride CMOS-compatible platform for integrated photonics applications at visible wavelengths. Opt. Express 21(12), 14036–14046 (2013)CrossRef ADS
11.S. Romero-García, F. Merget, F. Zhong, H. Finkelstein, J. Witzens, Visible wavelength silicon nitride focusing grating coupler with AlCu/TiN reflector. Opt. Lett. 38(14), 2521–2523 (2013)CrossRef ADS
12.D. Duval, J. Osmond, S. Dante, C. Domlnguez, L.M. Lechuga, Grating couplers integrated on Mach–Zehnder interferometric biosensors operating in the visible range. IEEE Photonics J. 5(2), 3700108 (2013)CrossRef
13.M. Yonemura, A. Kawasaki, S. Kato, M. Kagami, Polymer waveguide module for visible wavelength division multiplexing plastic optical fiber communication. Opt. Lett. 30(17), 2206–2208 (2005)CrossRef ADS
14.Y. Komai, H. Nagano, K. Okamoto, K. Kodate, Compact spectroscopic sensor using a visible arrayed waveguide grating. Jpn. J. Appl. Phys. 45(8B), 6742–6749 (2006)CrossRef ADS
15.E. Shah Hosseini, S. Yegnanarayanan, A.H. Atabaki, M. Soltani, A. Adibi, High quality planar silicon nitride microdisk resonators for integrated photonics in the visible wavelength range. Opt. Express 17(17), 14543–14551 (2009)CrossRef ADS
16.R. Chen, H.D. Sun, T. Wang, K.N. Hui, H.W. Choi, Optically pumped ultraviolet lasing from nitride nanopillars at room temperature. Appl. Phys. Lett. 96(24), 241101 (2010)CrossRef ADS
17.P.S. Priambodo, T.A. Maldonado, R. Magnusson, Fabrication and characterization of high-quality waveguide-mode resonant optical filters. Appl. Phys. Lett. 83(16), 3248–3250 (2003)CrossRef ADS
18.K. Chaganti, I. Salakhutdinov, I. Avrutsky, G.W. Auner, Sub-micron grating fabrication on hafnium oxide thin-film waveguides with focused ion-beam milling. Opt. Express 14(4), 1505–1511 (2006)CrossRef ADS
19.W.S. Zaoui, A. Kunze, W. Vogel, M. Berroth, J. Butschke, F. Letzkus, J. Burghartz, Bridging the gap between optical fibers and silicon photonic integrated circuits. Opt. Express 22(2), 1278–1286 (2014)CrossRef ADS
20.X. Chen, C. Li, H.K. Tsang, Device engineering for silicon photonics. NPG Asia Mater. 3(1), 34–40 (2011)CrossRef
21.M. Arita, S. Ishida, S. Kako, S. Iwamoto, Y. Arakawa, AlN air
idge photonic crystal nanocavities demonstrating high quality factor. Appl. Phys. Lett. 91(5), 051106 (2007)CrossRef ADS
22.K.B. Crozier, V. Lousse, O. Kilic, S. Kim, S. Fan, O. Solgaard, Air
idged photonic crystal slabs at visible and near-infrared wavelengths. Phys. Rev. B 73(11), 115126 (2006)CrossRef ADS
23.Y. Wang, Z. Shi, X. Li, M. Lopez-Garcia, L. Chen, N.A. Hueting, M.J. Cryan, M. Zhang, H. Zhu, Circular GaN membrane gratings. IEEE Photonics Technol. Lett. 26(9), 915–918 (2014)CrossRef ADS
24.Y. Wang, Z. Shi, X. Li, S. He, M. Zhang, H. Zhu, Surface-normal emission from subwavelength GaN membrane grating. Opt. Express 22(1), 667–672 (2014)CrossRef ADS
25.H. Sameshima, T. Tanae, K. Hane, A GaN electromechanical tunable grating on Si substrate. IEEE Photonics Technol. Lett. 23(5), 281–283 (2011)
26.Y. Wang, T. Sasaki, T. Wu, F. Hu, K. Hane, Comb-drive GaN micro mirror on a GaN-on-silicon platform. J. Micromech. Microeng. 21(3), 035012 (2011)CrossRef ADS
27.N.V. Trivino, U. Dharanipathy, J.-F. Carlin, Z. Diao, R. Houdre, N. Grandjean, Integrated photonics on silicon with wide bandgap GaN semiconductor. Appl. Phys. Lett. 102(8), 081120 (2013)CrossRef ADS
28.J.J. Wierer Jr, A. David, M.M. Megens, III-nitride photonic-crystal light-emitting diodes with high extraction efficiency. Nat. Photonics 3(3), 163–169 (2009)CrossRef ADS
29.Y. Wang, X. Gao, Z. Shi, L. Chen, M. Lopez Garcia, N.A. Hueting, M. Cryan, X. Li, M. Zhang, H. Zhu, Guided-mode resonant HfO2 grating at visible wavelength range. IEEE Photonics J. 6(2), 2200407 (2014)
30.X. Gao, Z. Shi, X. Li, H. Zhu, Y. Wang, Multiline resonant filters fashioned with different periodic subwavelength gratings. Opt. Lett. 39(23), 6660–6663 (2014)CrossRef ADS
31.R. Halir, A. Ortega-Monux, J.H. Schmid, C. Alonso-Ramos, J. Lapointe, D.-X. Xu, J.G. Wanguemert-Perez, I. Molina-Fernandez, S. Janz, Recent advances in silicon waveguide devices using sub-wavelength gratings. IEEE J. Sel. Top. Quantum 20(4), 8201313 (2014)CrossRef
32.X. Chen, Z. Cheng, C.K.Y. Fung, H.K. Tsang, Design and applications of silicon waveguide grating couplers. Proc. SPIE 8266, 82660I (2012)CrossRef ADS
33.R. Dylewicz, R.A. Hogg, R. Airey, R. Paszkiewicz, P. Bientsman, S. Patela, Simulations of nanograting-assisted light coupling in GaN planar waveguide. Opt. Quantum Electron. 42(9–10), 619–629 (2011)CrossRef - 作者单位：Qifa Liu (1)
Wei Wang (1)
Tongliang Sa (1)
Shumin He (1)
Xin Li (1)
Gangyi Zhu (1)
Yongjin Wang (1)
1. Grünberg Research Center, Nanjing University of Posts and Telecommunications, Nanjing, 210003, China - 刊物类别：Physics and Astronomy
- 刊物主题：Physics
Electromagnetism, Optics and Lasers
Physical Chemistry
Laser Technology and Physics and Photonics
Quantum Optics, Quantum Electronics and Nonlinear Optics
Optical Spectroscopy and Ultrafast Optics
Physics and Applied Physics in Engineering - 出版者：Springer Berlin / Heidelberg
- ISSN：1432-0649
文摘
Subwavelength grating couplers implemented on free-standing HfO2 membrane are proposed for out-of-plane coupling of visible light. The device is realized by double-side fabrication, which combines front patterning of grating grooves with a back-releasing of the Si substrate. The free-standing HfO2 membrane with diameter ~200 μm and thickness 200 nm is fabricated by including an auxiliary structure into the membrane to release residual stress. The fabricated grating parameters are characterized by scanning electron microscope and atomic force microscope. TE and TM light coupling into and out of the planar membrane waveguide is thoroughly investigated by a numerical finite element method simulation and experiment. Two pairs of gratings with different periods 350 and 330 nm, and filling factors 0.4 and 0.6, but the same etching depth 70 nm, were prepared. TE and TM light entered and exited the planar membrane through the grating coupling. The removal of the substrate suppresses radiation leakage. The coupling can be tuned by controlling the grating period, filling factor, and light incident angles. Free-standing HfO2 planar photonics in the visible spectrum may be used to realize specialized or highly sensitive sensors, beam splitters, or display components, and for particular wavelength extraction.