Fabrication of three-dimensional (3D) woodpile structure photonic crystal with layer by layer e-beam lithography

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• 作者：Li Wang ; Sasa Zhang ; Qingpu Wang ; Jiaqi Chen ; Wei Jiang and Ray T. Chen
• 关键词：PACS 42.70.Qs ; 42.82.Cr ; 81.05. ; t
• 刊名：Applied Physics A: Materials Science & Processing
• 出版年：2009
• 出版时间：May, 2009
• 年：2009
• 卷：95
• 期：2
• 页码：329-334
• 全文大小：1.1 MB

文摘

Photonic crystal based superprism offers a way to design new optical components for beam steering and DWDM (Dense Wavelength Division Multiplexing) application. Three-dimensional (3D) photonic crystals are especially attractive as they could offer more control of the light beam. A FCT (Face-Centered-Tetragonal) woodpile structure has been fabricated using layer by layer stacking techniques with E-Beam lithography. Special planarizations and processes have been introduced to ensure the survivability and good alignment of the fabricated nanostructures. Scanning electron microscopy results proved the structure uniformity. With the proper design, the structure exhibits superprism effects around 1550 nm, and such effects have been observed in the experiments.