Simulation and Fabrication of SAW-Based Gas Sensor with Modified Surface State of Active Layer and Electrode Orientation for Enhanced Hub class="a-plus-plus">2ub> Gas Sensing

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• 作者：Md. Nazibul Hasan ; Santanu Maity ; Argha Sarkar…
• 关键词：Surface acoustic wave ; nanorod ; sensitivity ; hexagonal structure
• 刊名：Journal of Electronic Materials
• 出版年：2017
• 出版时间：February 2017
• 年：2017
• 卷：46
• 期：2
• 页码：679-686
• 全文大小：
• 刊物类别：Chemistry and Materials Science
• 刊物主题：Optical and Electronic Materials; Characterization and Evaluation of Materials; Electronics and Microelectronics, Instrumentation; Solid State Physics;
• 出版者：Springer US
• ISSN：1543-186X
• 卷排序：46

文摘

The design, analysis, optimization, and fabrication of layered and nanostructure-based surface acoustic wave (SAW) gas sensors are presented. A lithium niobate and zinc oxide (ZnO) nano multilayer structure is proposed to enhance the sensitivity of the SAW-based gas sensor. Different materials are considered for the intermediate layer in the design for optimization purposes. The sensitivity of the sensor could be improved due to increased active surface area obtained by varying the aspect ratio of the nanorods, the thickness of the intermediate layer, and the gap between the electrodes. The total displacement and frequency shift of the device were significantly improved. Overall, the mechanically engineered surface-based (nanorod) SAW gas sensor offered better sensing response than the layered SAW gas sensor in terms of sensitivity performance.