Titanium Oxide Adhesion Layer for High Temperature Annealed Si/Si3N4/TiO x /Pt/LiCoO2 Battery Structures
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- 作者：E. M. F. Vieira ; J. F. Ribeiro ; R. Sousa ; M. M. Silva…
- 关键词：Li ; microbatteries ; platinum ; titanium oxide ; adhesion layer ; high temperature ; ToF ; SIMS
- 刊名：Journal of Electronic Materials
- 出版年：2016
- 出版时间：February 2016
- 年：2016
- 卷：45
- 期：2
- 页码：910-916
- 全文大小：2,224 KB
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J. F. Ribeiro (1) (2)
R. Sousa (3)
M. M. Silva (4)
L. Dupont (5)
L. M. Gonçalves (1)
1. University of Minho, CMEMS UMINHO, Guimarães, Portugal
2. Algoritmi Centre, University of Minho, Guimarães, Portugal
3. DEI, University of Minho, Guimarães, Portugal
4. Chemistry Center, University of Minho, Braga, Portugal
5. Université de Picardie Jules Verne, LRCS, UMR CNRS 7314, Amiens, France - 刊物类别：Chemistry and Materials Science
- 刊物主题：Chemistry
Optical and Electronic Materials
Characterization and Evaluation Materials
Electronics, Microelectronics and Instrumentation
Solid State Physics and Spectroscopy - 出版者：Springer Boston
- ISSN：1543-186X
文摘
This work describes the influence of a high annealing temperature of about 700°C on the Si(substrate)/Si3N4/TiO x /Pt/LiCoO2 multilayer system for the fabrication of all-solid-state lithium ion thin film microbatteries. Such micro-batteries typically utilize lithium cobalt oxide (LiCoO2) as cathode material with a platinum (Pt) current collector. Silicon nitride (Si3N4) is used to act as a barrier against Li diffusion into the substrate. For a good adherence between Si3N4 and Pt, commonly titanium (Ti) is used as intermediate layer. However, to achieve crystalline LiCoO2 the multilayer system has to be annealed at high temperature. This post-treatment initiates Ti diffusion into the Pt-collector and an oxidation to TiO x , leading to volume expansion and adhesion failures. To solve this adhesion problem, we introduce titanium oxide (TiO x ) as an adhesion layer, avoiding the diffusion during the annealing process. LiCoO2, Pt and Si3N4 layers were deposited by magnetron sputtering and the TiO x layer by thermal oxidation of Ti layers deposited by e-beam technique. As-deposited and annealed multilayer systems using various TiO x layer thicknesses were studied by scanning electron microscopy (SEM) and time-of-flight secondary ion mass spectrometry (ToF-SIMS) and x-ray photoelectron spectroscopy (XPS). The results revealed that an annealing process at temperature of 700°C leads to different interactions of Ti atoms between the layers, for various TiO x layer thicknesses (25–45 nm). Keywords Li-microbatteries platinum titanium oxide adhesion layer high temperature ToF-SIMS