Discrete microfluidics based on aluminum nitride surface acoustic wave devices
详细信息 查看全文
- 作者：J. Zhou ; H. F. Pang ; L. Garcia-Gancedo ; E. Iborra…
- 关键词：Surface acoustic wave ; SAW ; AlN film ; Microfluidic ; Streaming
- 刊名：Microfluidics and Nanofluidics
- 出版年：2015
- 出版时间：April 2015
- 年：2015
- 卷：18
- 期：4
- 页码：537-548
- 全文大小：2,397 KB
- 参考文献：1. Alghane, M, Fu, YQ, Chen, BX, Li, Y, Desmulliez, MPY, Walton, AJ (2011) Streaming phenomena in microdroplets induced by Rayleigh surface acoustic wave. J Appl Phys 109: pp. 114901 CrossRef
2. Bourquin, Y, Reboud, J, Wilson, R, Cooper, JM (2010) Tuneable surface acoustic waves for fluid and particle manipulations on disposable chips. Lab Chip 10: pp. 1898-1901 CrossRef
3. Bu, G, Ciplys, D, Shur, M, Schowalter, LJ (2004) Electromechanical coupling coefficient for surface acoustic waves in single-crystal bulk aluminum nitride. Appl Phys Lett 84: pp. 4611-4613 CrossRef
4. Cheng H, Sun Y, Zhang JX, Zhang YB, Yuan S, Hing P (2003) AlN films deposited under various nitrogen concentrations by RF reactive sputtering. J Cryst Growth 24:46-4
5. Chung, GS, Phan, DT (2010) Finite element modeling of surface acoustic waves in piezoelectric thin films. J Korean Phys Soc 57: pp. 446-450 CrossRef
6. Ding XY, Li P, Lin S-CS, Stratton ZS, Nama N, Guo F, Slotcavage D, Mao XL, Shi JJ, Costanzo F, Huang TJ (2013) Surface acoustic wave microfluidics. Lab Chip 13:3626-649
7. Du, XY, Fu, YQ, Tan, SC, Luo, JK (2008) ZnO film thickness effect on surface acoustic wave modes and acoustic streaming. Appl Phys Lett 93: pp. 094105 CrossRef
8. Du, XY, Fu, YQ, Tan, SC, Luo, JK, Flewitt, AJ, Lee, DS, Maeng, S, Kim, SH, Choi, YJ, Park, NM, Park, J, Milne, WI (2009) Microfluidic pumps employing surface acoustic waves generated in ZnO thin films. J Appl Phys 105: pp. 024508 CrossRef
9. Franke T, Abate AR, Weitz DA, Wixforth A (2009) Surface acoustic wave (SAW) directed droplet flow in microfluidics for PDMS devices. Lab Chip 9:2625-627
10. Franke, T, Braunmuller, S, Schmid, L, Wixforth, A, Weitz, DA (2010) Surface acoustic wave actuated cell sorting. Lab Chip 10: pp. 789-794 CrossRef
11. Friend, JR, Yeo, LY (2011) Microscale acoustofluidics: microfluidics driven via acoustics and ultrasonics. Rev Mod Phys 83: pp. 647-704 CrossRef
12. Fu, YQ, Luo, JK, Du, X, Flewitt, AJ, Li, Y, Walton, A, Milne, WI (2010) Recent developments on ZnO films for acoustic wave based bio-sensing and microfluidic applications: a review. Sens Actuat B 143: pp. 606-619 CrossRef
13. Fu YQ, Cherng JS, Luo J, Flewitt AJ, Walton AJ, Desmulliez M, Milne WI, Placido F (2010) Aluminium nitride thin film acoustic wave devices for Microfluidic and biosensing applications. In: Dissanayake DW (ed) Chapter 12, in acoustic waves. Rijeka, Croatia, Sciyo
14. Fu, YQ, Li, Y, Zhao, C, Placido, F, Walton, AJ (2012) Surface acoustic wave nebulization on nanocrystalline ZnO film. Appl Phys Lett 101: pp. 194101 CrossRef
15. Fu, YQ, Garcia-Gancedo, L, Pang, HF, Porro, S, Gu, YW, Luo, JK, Zu, XT, Placido, F, Wilson, JIB, Flewitt, AJ, Milne, WI (2012) Microfluidics based on ZnO/nanocrystalline diamond surface acoustic wave devices. Biomicrofluidics 6: pp. 02410 CrossRef
16. Garcia-Gancedo, L, Pedros, J, Zhao, XB, Ashley, GM, Flewitt, AJ, Milne, WI, Ford, CJB, Lu, JR, Luo, JK (2012) Dual-mode thin film bulk acoustic wave resonators for parallel sensing of temperature and mass loading. Biosens Bioelectron 38: pp. 369-374 CrossRef
17. Guttenberg, Z, Muller, H, Habermuller, H, Geisbauer, A, Pipper, J, Felbel, J, Kielpinski, M, Scriba, J, Wixforth, A (2005) Planar chip device for PCR and hybridization with surface acoustic wave pump. Lab Chip 5: pp. 308-317 CrossRef
18. Heinze H et al (2004) 3.8×3.8?mm2 - 刊物类别：Engineering
- 刊物主题：Engineering Fluid Dynamics
Medical Microbiology
Polymer Sciences
Nanotechnology
Mechanics, Fluids and Thermodynamics
Engineering Thermodynamics and Transport Phenomena - 出版者：Springer Berlin / Heidelberg
- ISSN：1613-4990
文摘
To date, most surface acoustic wave (SAW) devices have been made from bulk piezoelectric materials, such as quartz, lithium niobate or lithium tantalite. These bulk materials are brittle, less easily integrated with electronics for control and signal processing, and difficult to realize multiple wave modes or apply complex electrode designs. Using thin film SAWs makes it convenient to integrate microelectronics and multiple sensing or microfluidics techniques into a lab-on-a-chip with low cost and multi-functions on various substrates (silicon, glass or polymer). In the work, aluminum nitride (AlN)-based SAW devices were fabricated and characterized for discrete microfluidic (or droplet based) applications. AlN films with a highly c-axis texture were deposited on silicon substrates using a magnetron sputtering system. The fabricated AlN/Si SAW devices had a Rayleigh wave mode at a frequency of 80.3?MHz (with an electromechanical coupling coefficient k 2 of 0.24?% and phase velocity v p of 5,139?m/s) and a higher-frequency-guided wave mode at 157.3?MHz (with a k 2 value of 0.22?% and v p of 10,067?m/s). Both modes present a large out of band rejection of ~15?dB and were successfully applied for microfluidic manipulation of liquid droplets, including internal streaming, pumping and jetting/nebulization, and their performance differences for microfluidic functions were discussed. A detailed investigation of the influences of droplet size (ranging from 3 to 15?μL) and RF input power (0.25-8?W) on microdroplet behavior has been conducted. Results showed that pumping and jetting velocities were increased with an increase of RF power or a decrease in droplet size.