Effect of Substrate Temperatures on Structural and Morphological Properties of Nano-Crystalline Silver Thin Films Grown on Silicon Substrates

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• 作者：A. Hojabri ; Z. Kavyani ; M. Ghoranneviss
• 关键词：Ag ; Substrate temperature ; Thin film ; Structural ; Morphological ; Annealing
• 刊名：Journal of Inorganic and Organometallic Polymers and Materials
• 出版年：2017
• 出版时间：January 2017
• 年：2017
• 卷：27
• 期：1
• 页码：53-60
• 全文大小：
• 刊物类别：Chemistry and Materials Science
• 刊物主题：Inorganic Chemistry; Organic Chemistry; Polymer Sciences;
• 出版者：Springer US
• ISSN：1574-1451
• 卷排序：27

文摘

The silver (Ag) thin films were deposited on silicon substrates by DC magnetron sputtering method under different substrate temperatures of 100–500 °C. Then the as-deposited films were subjected to annealing treatment. The XRD results revealed that the Ag thin films have a good nanocrystalline structure and a considerable increase in the crystallinity of Ag (111) peak was observed at substrate temperature of 200 °C. The average crystalline size of Ag films varied between 18 and 44 nm which confirms the presence of nanocrystal’s in the films. The AFM and SEM images demonstrated that the grain size and surface roughness of the films are sensitive to substrate temperature during deposition of the films and annealing treatment. The SEM results is in good agreement with the results of XRD and AFM analysis.