Double-textured ZnO:Al films obtained by a one-step etching method for enhanced light trapping

详细信息    查看全文

• 作者：Ying Wang ; Weiwei Jiang ; Wanyu Ding…
• 刊名：Journal of Materials Science: Materials in Electronics
• 出版年：2017
• 出版时间：February 2017
• 年：2017
• 卷：28
• 期：4
• 页码：3530-3534
• 全文大小：
• 刊物类别：Chemistry and Materials Science
• 刊物主题：Optical and Electronic Materials; Characterization and Evaluation of Materials;
• 出版者：Springer US
• ISSN：1573-482X
• 卷排序：28

文摘

Double-textured ZnO:Al (AZO) transparent conducting films with good optoelectronic characteristics and enhanced light trapping ability were prepared by a method including deposition, etching and re-deposition, and only one-step etching process was adopted during the whole process. The effects of the one-step etching method on the structural and optoelectronic properties, surface morphology and light trapping ability of double-textured AZO films were studied systematically. Double-textured films were covered with uniformly and distinctly crater-like textured structure after the re-deposition. And double-textured AZO films exhibited higher haze values compared with the single-textured films. Effective enhancement of light trapping was obtained from the double-textured AZO films by the one-step etching method.