Optical properties of BaTiO₃ thin films: Influence of oxygen pressure utilized during pulsed laser deposition

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• 作者：J. Hiltunen ; D. Seneviratne ; R. Sun ; M. Stolfi ; H. L. Tuller ; J. Lappalainen and V. Lantto
• 关键词：BaTiO3 ; Thin film ; Electro ; optic ; Birefringence
• 刊名：Journal of Electroceramics
• 出版年：2009
• 出版时间：June, 2009
• 年：2009
• 卷：22
• 期：4
• 页码：416-420
• 全文大小：169.6 KB

文摘

The crystallographic properties of BaTiO₃ thin films, grown by pulsed laser deposition on MgO substrates, were found to be strongly influenced by the oxygen pressure used during growth. Low pressure grown films were c-oriented while increasing oxygen pressure produced films with preferred a-orientation. The crystal reorientation resulted in the shift of optical birefringence from +0.04 to −0.025 with low levels of birefringence in films possessing low tetragonal distortion. Mach-Zehnder electro-optic waveguide modulators were fabricated to characterize the electro-optic properties of the deposited films and to evaluate the suitability of these films for planar optical applications. An effective electro-optic coefficient of 23 pm/V was obtained for a c-axis oriented film near the crystal c→a reorientation point.