Precise contour motion of XY stage driven by ultrasonic linear motors in a high vacuum environment

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• 作者：Dong-Jin Lee ; Sun-Kyu Lee ; Wan-Soo Kim
• 关键词：Continuous motion ; Microdynamics ; NCTF ; Ultrasonic linear motor ; Vacuum environment
• 刊名：International Journal of Precision Engineering and Manufacturing
• 出版年：2016
• 出版时间：March 2016
• 年：2016
• 卷：17
• 期：3
• 页码：293-301
• 全文大小：942 KB
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• 作者单位：Dong-Jin Lee (1)
  Sun-Kyu Lee (1)
  Wan-Soo Kim (2)
  
  1. School of Mechatronics, Gwangju Institute of Science and Technology, 123, Cheomdangwagi-ro, Buk-gu, Gwangju, 61005, South Korea
  2. Scanner Competency Team, ASML Korea Co., Ltd., 25, 5-gil, Samsung 1-ro, Hwasung-si, Gyeonggi-do, 18449, South Korea
  
• 刊物类别：Engineering
• 刊物主题：Industrial and Production Engineering
  Materials Science
  
• 出版者：Korean Society for Precision Engineering, in co-publication with Springer Verlag GmbH
• ISSN：2005-4602

文摘

This paper presents the effect of a vacuum environment on the precise motion control of an XY stage driven by an ultrasonic linear motor. Hybrid, bolt-clamped Langevin-type (hybrid BLT) ultrasonic linear motors that operate at the resonance frequencies of the third longitudinal and sixth lateral modes were adopted in the XY stage. The vacuum environment affects the friction characteristics of the ultrasonic motor system’s driving elements significantly. In this study, the system was characterized according to the vacuum level in terms of the resonance frequency of the ultrasonic motor, the slope of the NCT curve in the micro-dynamics and macrodynamics regimes, the range of the micro-dynamics, and the range of the dead zone. In accordance with the variations in the resonance frequency, the frequency was adjusted to match the resonance frequencies of the longitudinal and lateral modes using an external inductor. Based on the variations in the dead zone and dynamic characteristics, a control algorithm was designed by continuously employing nominal characteristics trajectory following (NCTF) control, feedforward control, and switching control based on the micro-dynamics and macro-dynamics Ultraprecision level of motion accuracy was achieved by the developed system in a high vacuum environment.