Processing-microstructure-resulting materials properties of LIGA Ni

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• 作者：K. Lian ; J. C. Jiang and Z. G. Ling
• 刊名：Microsystem Technologies
• 出版年：2007
• 出版时间：February, 2007
• 年：2007
• 卷：13
• 期：3-4
• 页码：259-264
• 全文大小：423 KB
• 刊物类别：Engineering
• 刊物主题：Electronics, Microelectronics and Instrumentation
  Nanotechnology
  Mechanical Engineering
  Operating Procedures and Materials Treatment
  
• 出版者：Springer Berlin / Heidelberg
• ISSN：1432-1858

文摘

Electroplated nickel is the main material used in LIGA technique for fabricating MicroElectroMechanical System (MEMS) components. This paper presents the recent results regarding LIGA Ni material property enhancement at Center for Advanced Microstructures and Devices at Louisiana State University. The methodology of this study is based on the fundamental materials science paradigm that processing and manufacturing determine the microstructure of materials, which results in specific properties, and governs the performance of the structures that are made from these materials. This paper will focus on results in three aspects of our current research efforts, which are: (1) manipulating the plating parameters to tailor deposited Ni microstructures for different grain size distributions that are in the range of tens nanometer in diameters; (2) analyzing the mechanical properties, such as nano-hardness, micro-hardness, and wearing property as the function of LIGA Ni metallurgical microstructures; (3) estimating the corrosion properties of nanocrystalline LIGA Ni.