文摘
Coupled theories of fractional-order heat conduction and elastic waves were used to study the vibration of microcantilevers during a photothermal process in this paper. By means of the Laplace transform technique, expressions for the field quantities (temperature and deflection) were obtained analytically in the Laplace transform domain. Using Bromwich contour intergration, the solution of field quantities was given numerically and graphically in the time domain. The obvious vibration characterization can be observed for microcantilevers under laser excitation. The results showed that the parameter of fractional order, i.e., conductibility of material, had a significant effect on the temperature and deflection of a microcantilever. Also, the change of field quantities with frequency and time was given illustratively for different fractional-order parameters.