Modification of YBa2Cu3O7–δ thin films by ion implantation
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- 作者：V. K. Vasiliev ; D. S. Korolev ; S. A. Korolev…
- 刊名：Journal of Surface Investigation: X-ray, Synchrotron and Neutron Techniques
- 出版年：2016
- 出版时间：March 2016
- 年：2016
- 卷：10
- 期：2
- 页码：438-440
- 全文大小：418 KB
- 刊物类别：Chemistry and Materials Science
- 刊物主题：Chemistry
Surfaces and Interfaces and Thin Films
Russian Library of Science - 出版者：MAIK Nauka/Interperiodica distributed exclusively by Springer Science+Business Media LLC.
- ISSN：1819-7094
- 卷排序：10
文摘
The formation of a topological structure in thin films of the high-temperature superconductor YBa2Cu3O7–δ (YBCO) using ion implantation is studied. The crystal structure and electrical properties of the initial film and the formed insulating regions are investigated. The critical temperature and critical current are measured for microbridges with a width of 3–50 μm fabricated by ion implantation. The results indicate the effectiveness of the ion-implantation method for manufacturing topological structures in YBCO films.KeywordsYВСО filmsion implantationtopological structure