Microtexture fabrication on cylindrical metallic surfaces and its application to a rotor-bearing system

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• 作者：Xiuqing Hao ; Shiyuan Pei ; Li Wang ; Hua Xu…
• 关键词：Surface texturing ; Electrochemical micromachining (EMM) ; Cylindrical surface ; Radial sliding bearing ; Vibration reduction
• 刊名：The International Journal of Advanced Manufacturing Technology
• 出版年：2015
• 出版时间：May 2015
• 年：2015
• 卷：78
• 期：5-8
• 页码：1021-1029
• 全文大小：3,699 KB
• 参考文献：1.Kligerman Y, Etsion I (2001) Analysis of the hydrodynamic effects in a surface textured circumferential gas seal. Tribol Trans 44(3):472-78View Article
  2.Vilhena LM, Sedlacek M, Podgornik B, Vizintin J, Babnik A, Mozina J (2009) Surface texturing by pulsed Nd: YAG laser. Tribol Int 42(10):1496-504View Article
  3.Byun JW, Shin HS, Kwon MH, Kim BH, Chu CN (2010) Surface texturing by micro ECM for friction reduction. Int J Precis Eng Manuf 11(5):747-53View Article
  4.Choi JH, Kim GM (2011) Micro-patterning on non-planar surface using flexible microstencil. Int J Precis Eng Manuf 12(1):165-68View Article
  5.Kim JG, Takama N, Kim BJ, Fujita H (2009) Optical-soft lithographic technology for patterning on curved surfaces. J Micromech Microeng 19(5):8, 055017
  6.Gupta MC, Li B, Gadag S, Chou KC (2010) Laser micromachining for fatigue and fracture mechanics applications. Opt Lasers Eng 48(4):441-47View Article
  7.Zeman R, Bleicher F, Zisser-Pfeifer R (2012) Some practical contributions of the technology of electrochemical micromachining with ultra short pulses. Galvanotechnik 103(4):722-
  8.Marcinkevicius A, Juodkazis S, Watanabe M, Miwa M, Matsuo S, Misawa H, Nishii J (2001) Femtosecond laser-assisted three-dimensional microfabrication in silica. Opt Lett 26(5):277-79View Article
  9.Gattass RR, Mazur E (2008) Femtosecond laser micromachining in transparent materials. Nat Photonics 2(4):219-25View Article
  10.Li X, Bohn PW (2000) Metal-assisted chemical etching in HF/H(2)O(2) produces porous silicon. Appl Phys Lett 77(16):2572-574View Article
  11.Moszner N, Salz U, Zimmermann J (2005) Chemical aspects of self-etching enamel-dentin adhesives: a systematic review. Dent Mater 21(10):895-10View Article
  12.Qian BT, Shen ZQ (2005) Fabrication of superhydrophobic surfaces by dislocation-selective chemical etching on aluminum, copper, and zinc substrates. Langmuir 21(20):9007-009View Article
  13.Bae WG, Song KY, Rahmawan Y, Chu CN, Kim D, Chung do K, Suh KY (2012) One-step process for superhydrophobic metallic surfaces by wire electrical discharge machining. ACS Appl Mater Interfaces 4(7):3685-691View Article
  14.Balasubramaniam R, Krishnan J, Ramakrishnan N (2002) A study on the shape of the surface generated by abrasive jet machining. J Mater Process Technol 121(1):102-06View Article
  15.Ghobeity A, Getu H, Krajac T, Spelt JK, Papini M (2007) Process repeatability in abrasive jet micro-machining. J Mater Process Technol 190(1-):51-0View Article
  16.Ephrath LM (1979) Selective etching of silicon dioxide using reactive ion etching with CF4-H2. J Electrochem Soc 126(8):1419-421View Article
  17.Tachi S, Tsujimoto K, Okudaira S (1988) Low-temperature reactive ion etching and microwave plasma-etching of silicon. Appl Phys Lett 52(8):616-18View Article
  18.Shaw KA, Zhang ZL, Macdonald NC (1994) Scream i: a single mask, single-crystal silicon, reactive ion etching process for microelectromechanical structures. Sensors Actuators A-Phys 40(1):63-0View Article
  19.Lammertink RGH, Hempenius MA, van den Enk JE, Chan VZH, Thomas EL, Vancso GJ (2000) Nanostructured thin films of organic-organometallic block copolymers: one-step lithography with poly(ferrocenylsilanes) by reactive ion etching. Adv Mater 12(2):98-03View Article
  20.Mineta T (2004) Basic characteristics of an electrochemical etching of Ni-Fe containing corrosion resistant alloys. Sensors Actuators A-Phys 114(2-):536-42View Article
  21.Datta M, Harris D (1997) Electrochemical micromachining: an environmentally friendly, high speed processing technology. Electrochim Acta 42(20-2):3007-013View Article
  22.Bhattacharyya B, Munda J, Malapati M (2004) Advancement in electrochemical micro-machining. Int J Mach Tools Manuf 44(15):1577-589View Article
  23.Lee ES, Park JW, Moon YH (2002) A study on electrochemical micromachining for fabrication of microgrooves in an air-lubricated hydrodynamic bearing. Int J Adv Manuf Technol 20(10):720-26View Article
  24.Munda J, Bhattacharyya B (2008) Investigation into electrochemical micromachining (EMM) through response surface methodology based approach. Int J Adv Manuf Technol 35(7-):821-32View Article
  25.Spieser A, Ivanov A (2013) Recent developments and research challenges in electrochemical micromachining (A mu ECM). Int J Adv Manuf Technol 69(1-):563-81View Article
  26.Jiang LM, Li W, Attia A, Cheng ZY, Tang J, Tian ZQ, Tian ZW (2008) A potential method for electrochemical micromachining of titanium alloy Ti6Al4V. J Appl Electrochem 38(6):785-91View Article
  27.Tang J, Zhang L, Tian X (2010) Micromachining on copper and nickel by electrochemical wet stamping. J Micromech Microeng 20(11):115030View Article
  28.Kern P, Veh J, Michler J (2007) New developments in through-mask electrochemical micromachining of titanium. J Micromech Microeng 17(6):1168-177View Article
  29.Dar-Yuan C, Ping-Chen S, Jung-Chou H, Shuo-Jen L, Hai-Pi
• 作者单位：Xiuqing Hao (1) (2)
  Shiyuan Pei (1)
  Li Wang (1)
  Hua Xu (1)
  Ning He (2)
  Bingheng Lu (1)
  
  1. State Key Laboratory for Manufacturing Systems Engineering, School of Mechanical Engineering, Xi’an Jiaotong University, Xi’an, 710054, China
  2. College of Mechanical and Electrical Engineering, Nanjing University of Aeronautics and Astronautics, Nanjing, 210016, China
  
• 刊物类别：Engineering
• 刊物主题：Industrial and Production Engineering
  Production and Logistics
  Mechanical Engineering
  Computer-Aided Engineering and Design
  
• 出版者：Springer London
• ISSN：1433-3015

文摘

A process to fabricate large-scale three-dimensional microstructures for cylindrical objects is developed by employing the techniques of pre-treatment, coating, rolling exposure, and electrochemical micromachining (EMM). In this work, the rolling exposure technique is advanced and used to fabricate a patterned photoresist mask. Several experiments are implemented to understand the dependence of the microtexture morphology on the EMM process. The various electrochemical mechanisms involved in the EMM process are discussed in detail. Furthermore, the texture surfaces are introduced into a rotor-bearing system and demonstrated a 64?% reduction in the vibrations, improving the stability for the first time. The results of the present study demonstrate the feasibility of using through-mask EMM for producing high-precision topographies on cylindrical objects, and that the application of surface textures in the rotor-bearing system is practical. The technique developed in this study is expected to lead to enhancements in roll-based manufacturing and automotive tribology.