文摘
Ba6?xNd8+2xTi18O54 (x?=?2/3, BNT) thin films were obtained by the Pechini sol–gel technique on the Si and Pt/Ti/SiO2/Si substrates. The heat treatment schedule was researched by differential scanning calorimetry and thermal gravimetry. The effects of annealing temperature on crystallinity and morphological characteristic were investigated by X-ray diffraction and scanning electron microscope. The results show that a crystallized thin film with a tungsten bronze structure was obtained by annealing the films at 950?°C. With the aid of 2?wt% B2O3-SiO2 addition, the crystallization temperature decreased to 900?°C. The dielectric characteristics measurement showed that the dielectric constant and the dielectric loss of the BNT thin films were 45.2 and 0.011 at 1?MHz frequency, the leakage current density was 4.13?×?10??A/cm2 at bias of 30?V.