High aspect ratio, high-quality microholes in PMMA: a comparison between femtosecond laser drilling in air and in vacuum

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• 作者：Bo Xia ; Lan Jiang ; Xiaowei Li ; Xueliang Yan ; Weiwei Zhao ; Yongfeng Lu
• 刊名：Applied Physics A: Materials Science & Processing
• 出版年：2015
• 出版时间：April 2015
• 年：2015
• 卷：119
• 期：1
• 页码：61-68
• 全文大小：1,213 KB
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• 刊物类别：Physics and Astronomy
• 刊物主题：Physics
  Condensed Matter
  Optical and Electronic Materials
  Nanotechnology
  Characterization and Evaluation Materials
  Surfaces and Interfaces and Thin Films
  Operating Procedures and Materials Treatment
  
• 出版者：Springer Berlin / Heidelberg
• ISSN：1432-0630

文摘

Microholes, especially high aspect ratio, high-quality microholes with small diameters (PMMA) bulk substrate with the ambient pressure adjusted from 105?Pa (air) down to 1?Pa (vacuum) is presented. High aspect ratio (over 100:1) microholes were obtained in a vacuum environment. The contrast between microhole evolution in air and in vacuum was investigated. The results indicate that efficient energy propagation and easy ejection of ablated material/plasma are probably the most important benefits of drilling microholes in vacuum. The dependence of microhole shapes on different fabrication parameters, including pulse energy and ambient pressure, was investigated to quantitatively reveal the underlying mechanisms. The enhanced drilling effect in vacuum was only found in a high pulse energy region (E p?>?20?μJ), and it becomes saturated when the ambient pressure was reduced to ~102?Pa at a pulse energy of 50?μJ. Drilling microholes in a vacuum provides a simple and effective way of rapidly fabricating high aspect ratio, high-quality microholes.