Improved dielectric properties of CaCu3Ti4O12 films with a CaTiO3 interlayer on Pt/TiO2/SiO
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  • 作者:Sung-Yun Lee ; Hui Eun Kim ; William Jo ; Young-Hwan Kim…
  • 关键词:CaCu3Ti4O12 films ; pulsed laser deposition ; dielectric property ; Poole ; Frenkel conduction model ; leakage current
  • 刊名:Electronic Materials Letters
  • 出版年:2015
  • 出版时间:November 2015
  • 年:2015
  • 卷:11
  • 期:6
  • 页码:1003-1011
  • 全文大小:2,401 KB
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  • 作者单位:Sung-Yun Lee (1)
    Hui Eun Kim (1)
    William Jo (2)
    Young-Hwan Kim (3)
    Sang-Im Yoo (1)

    1. Department of Materials Science and Engineering, Research Institute of Advanced Materials (RIAM), Seoul National University, Seoul, 151-744, Korea
    2. Department of Physics, Ewha Womans University, Seoul, 120-750, Korea
    3. Nano-Materials Center, Korea Institute of Science and Technology, Seoul, 136-791, Korea
  • 刊物类别:Chemistry and Materials Science
  • 刊物主题:Condensed Matter Physics
    Electronics, Microelectronics and Instrumentation
    Optical and Electronic Materials
    Thermodynamics
    Characterization and Evaluation of Materials
  • 出版者:The Korean Institute of Metals and Materials, co-published with Springer Netherlands
  • ISSN:2093-6788
文摘
We report the greatly improved dielectric properties of CaCu3Ti4O12 (CCTO) films with a 60 nm-thick CaTiO3 (CTO) interlayer on Pt/TiO2/SiO2/Si substrates. Both CCTO films and CTO interlayers were prepared by pulsed laser deposition (PLD). With increasing the thickness of CCTO from 200 nm to 1.3 μm, the dielectric constants (ε r ) at 10 kHz in both CCTO single-layered and CCTO/CTO double-layered films increased from ?60 to ?000 and from ?30 to ?700, respectively. Compared with CCTO single-layered films, CCTO/CTO double-layered films irrespective of CCTO film thickness exhibited a remarkable decrease in their dielectric losses (tanδ) (<0.1 at the frequency region of 1 - 100 kHz) and highly reduced leakage current density at room temperature. The reduced leakage currents in CCTO/CTO double-layered films are attributable to relatively higher trap ionization energies in the Poole-Frenkel conduction model.

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