Anisotropy of sapphire single crystal sputtering

详细信息    查看全文

• 作者：K. F. Minnebaev ; K. A. Tolpin…
• 刊名：Journal of Experimental and Theoretical Physics
• 出版年：2015
• 出版时间：August 2015
• 年：2015
• 卷：121
• 期：2
• 页码：222-228
• 全文大小：643 KB
• 参考文献：1.N. V. Pleshivtsev, Cathode Sputtering (Atomizdat, Moscow, 1968) [in Russian].
  2.R. Behrisch and K. Witmaack, Sputtering by Particle Bombardment: III, (Springer-Verlag, Berlin, 1991).CrossRef
  3.V. E. Yurasova, Interaction of Ions with the Surface (PrimaV, Moscow, 1999).
  4.R. Behrisch and W. Eckstein, Sputtering by Particle Bombardment: IV, (Springer-Verlag, Berlin, 2007).
  5.W. R. Grove, Philos. Mag. 5, 203 (1853).
  6.N. D. Morgulis, Usp. Fiz. Nauk 28, 202 (1946).
  7.G. K. Wehner, J. Appl. Phys. 26, 1056 (1955)CrossRef ADS
  7.G. K. Wehner, Phys. Rev. 102, 690 (1956).CrossRef ADS
  8.V. E. Yurasova, in Abstracts of Papers of the Eighth AllUnion Conference on Cathode Electronics, Leningrad, 1957, p. 15.
  9.V. E. Yurasova, Sov. Phys. Tech. Phys. 3, 1805 (1958).
  10.E. B. Henschke, J. Appl. Phys. 28, 411 (1957)CrossRef ADS
  10.E. B. Henschke, Phys. Rev. 106, 737 (1956).CrossRef ADS
  11.E. Langberg, Phys. Rev. 111, 91 (1958).
  12.R. H. Silsbee, J. Appl. Phys. 28, 1246 (1957).CrossRef ADS
  13.D. Onderdelinden, Appl. Phys. Lett. 8, 189 (1966).CrossRef ADS
  14.J. J. P. Elich and H. E. Roosendaal, Radiat. Eff. 10, 175 (1971).CrossRef ADS
  15.M. Robinson, in Sputtering by Particle Bombardment: I, Ed. by R. Behrisch (Springer-Verlag, Berlin, 1981), p. 73.
  16.V. E. Yurasova, N. V. Pleshivtsev, and I. V. Orfanov, Sov. Phys. JETP 10, 689 (1959).
  17.M. W. Thompson, Philos. Mag. 4, 139 (1959).CrossRef ADS
  18.M. W. Thompson, Defects and Radiation Damage in Metals (Cambridge University Press, Cambridge, 1969; Mir, Moscow, 1971).
  19.V. E. Yurasova and I. G. Sirotenko, Sov. Phys. JETP 14 (5), 968 (1961).
  20.V. E. Yurasova and E. A. Murinson, Izv. Akad. Nauk SSSR, Ser. Fiz. 26, 1445 (1962).
  21.W. O. Hofer, in Sputtering by Particle Bombardment: III, Ed. by R. Behrisch and K. Witmaack (Springer-Verlag, Berlin, 1991), p. 263.
  22.B. Perovi, Bull. Boris Kidrich Inst. Nucl. Sci. 11, 37 (1961).
  23.V. E. Yurasova, L. N. Levykina, and V. A. Brzhesinski, in Proceedings of the Third European Regional Conference on Electron Microscopy, Prague, Czechoslovakia, August 26–September 3, 1964 (Czechoslovak Academy of Sciences, Prague, Czechoslovakia, 1964), p. 281.
  24.M. Lucht, M. Lerche, H.-C. Wille, Yu. V. Shvyd’ko, H. D. Rüter, E. Gerdu, and P. Backer, J. Appl. Cryst. 36, 1975 (2003).CrossRef
  25.A. M. Streltsov and N. F. Borrelli, Opt. Lett. 26, 42 (2001).CrossRef ADS
  26.J. Toofan and P. R. Watson, Surf. Sci. 401, 162 (1978).CrossRef ADS
  27.Huili Tang, Hongjun Li, and Jun Xu, in Advanced Topics on Crystal Growth, Ed. by Sukarno Olavo Ferreira (InTech, Rijeka, Croatia, 2013), Chap. 10.
  28.M. Ardenne, Technik 2, 65 (1958).
  29.I. V. Orfanov and V. A. Teplyakov, Prib. Tekh. Eksp., No. 2, 150 (1960).
  30.M. T. Robinson and I. M. Torrens, Phys. Rev. B: Solid State 9, 5008 (1994).CrossRef ADS
  31.A. A. Promokhov, V. A. Eltekov, V. E. Yurasova, and A. S. Mosunov, Nucl. Instrum. Methods Phys. Res., Sect. B 115, 544 (1996).CrossRef ADS
  32.V. E. Yurasova, in Proceedings of the Seventh Yugoslav Symposium and Summer School on the Physics of Ionized Gases, Rovinj, Yugoslavia, September 16-1, 1974 (Institute of Physics of the University of Zagreb, Zagreb, Yugoslavia, 1975), p. 427.
  33.A. S. Mosunov, L. B. Shelyakin, V. E. Yurasova, D. ?iri?, B. Perovi?, and I. Terzi?, Radiat. Eff. 52, 85 (1980).CrossRef
  34.W. Eckstein, in Sputtering by Particle Bombardment: IV, Ed. by R. Behrisch and W. Eckstein (Springer-Verlag, Berlin, 2007), p. 33.
  35.A. A. Samarskii and A. V. Gulin, Numerical Methods (Nauka, Moscow, 1989) [in Russian].MATH
  36.O. B. Firsov, Sov. Phys. JETP 9, 488 (1957).
  37.H. H. Andersen and P. Sigmund, Nucl. Instrum. Methods 38, 298 (1965).ADS
  38.W. A. Harrison, Electronic Structure and the Properties of Solids: The Physics of Chemical Bond (W. H. Freeman, San Francisco, California, United States, 1980).
  39.K. F. Minnebaev, V. V. Khvostov, E. Yu. Zykova, K. A. Tolpin, J. S. Colligon, and V. E. Yurasova, in Abstracts of the 26th International Conference on Atomic Collisions in Solids (ICACS), Debrecen, Hungary, July 14-8, 2014 (Debrecen, 2014), p. 126.
  40.N. P. Katrich and A. T. Budnikov, Vopr. At. Nauki. Tekh., No. 4, 161 (2007).
  41.V. V. Khvostov, I. K. Khrustachev, K. F. Minnebaev, E. Yu. Zykova, and V. E. Yurasova, Vacuum 100, 84 (2014).CrossRef ADS
  
• 作者单位：K. F. Minnebaev (1)
  K. A. Tolpin (1)
  V. E. Yurasova (1)
  
  1. Department of Physics, Moscow State University, Moscow, 119991, Russia
  
• 刊物类别：Physics and Astronomy
• 刊物主题：Physics
  Elementary Particles and Nuclei
  Relativity and Cosmology
  Elementary Particles and Quantum Field Theory
  Solid State Physics and Spectroscopy
  Russian Library of Science
• 出版者：MAIK Nauka/Interperiodica distributed exclusively by Springer Science+Business Media LLC.
• ISSN：1090-6509

文摘

We have studied the spatial distribution of particles sputtered from the base (0001) plane of a sapphire single crystal with trigonal crystalline lattice (α-Al₂O₃) that can be considered a superposition of two hexagonal close packed (hcp) structures–the ideal sublattice of oxygen and a somewhat deformed sublattice of aluminum. It is established that the particles sputtered from the base plane of sapphire are predominantly deposited along the sides of an irregular hexagon with spots at its vertices. The patterns of spots have been also studied for sputtering of particles from the (0001) face of a zinc single crystal with the hcp lattice. The spots of sputtered Zn atoms are arranged at the vertices of concentric equilateral hexagons. In both cases, the observed anisotropy of sputtering is related to focused collisions (direct and assisted focusing) and the channeling process. The chemical composition of spots has been determined in various regions of sputtered sapphire deposition. The results are discussed in comparison to analogous earlier data for secondary ion emission from an α-Al₂O₃ single crystal. Original Russian Text ? K.F. Minnebaev, K.A. Tolpin, V.E. Yurasova, 2015, published in Zhurnal Eksperimental’noi i Teoreticheskoi Fiziki, 2015, Vol. 148, No. 2, pp. 258-65.