Near-Infrared Absorption Enhancement Mechanism Investigations of Deep-Trench Silicon Microstructures Covered with Gold Films

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• 作者：Xiaoyi Liu ; Jinsong Gao ; Haigui Yang ; Hai Liu ; Xiaoyi Wang ; Zhenfeng Shen
• 刊名：Plasmonics
• 出版年：2016
• 出版时间：August 2016
• 年：2016
• 卷：11
• 期：4
• 页码：1019-1024
• 全文大小：2,368 KB
• 刊物类别：Chemistry and Materials Science
• 刊物主题：Chemistry
  Biotechnology
  Nanotechnology
  Biophysics and Biomedical Physics
  Biochemistry
  
• 出版者：Springer US
• ISSN：1557-1963
• 卷排序：11

文摘

We design a deep-trench microstructure covered with thin gold films to enhance near-infrared absorption of silicon material. This deep-trench microstructure exhibits a much higher absorption compared with plane nanoantenna arrays. We investigate its absorption enhancement in detail and find that the trench-shaped plasmonic waveguide greatly contributes an absorption enhancement by concentrating light effectively. Further, we clarify the influence of both trench depth and gold films covering on different positions of deep trench on the absorption. Finally, we use surface plasmon polaritons offered by plasmonic waveguide to explain well the significant enhancement of near-infrared absorption.KeywordsNear-infrared absorptionDeep-trench microstructurePlasmonic waveguideSurface plasmon polaritons