A facility for measuring the thickness of thin metal films

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• 作者：Kh. B. Tolipov
• 关键词：wave field ; Lamb wave velocity ; thin films ; piezosensors
• 刊名：Russian Journal of Nondestructive Testing
• 出版年：2016
• 出版时间：October 2016
• 年：2016
• 卷：52
• 期：10
• 页码：554-556
• 全文大小：
• 刊物类别：Chemistry and Materials Science
• 刊物主题：Characterization and Evaluation of Materials; Structural Materials;
• 出版者：Pleiades Publishing
• ISSN：1608-3385
• 卷排序：52

文摘

A facility is described for measuring the thickness of a thin metal film. A measurement method is proposed that is based on the dependence of the phase velocity of harmonic antisymmetric Lamb waves that propagate along the film on the film thickness. A continuous method for excitation of acoustic waves has been applied to velocity measurements. It makes it possible to eliminate the effect of dispersion of the Lamb-wave velocity on the measurement accuracy.