A phase-locked loop frequency tracking system for portable microelectromechanical piezoresistive cantilever mass sensors

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• 作者：Hutomo Suryo Wasisto (1)
  Qing Zhang (1)
  Stephan Merzsch (1)
  Andreas Waag (1)
  Erwin Peiner (1)
  
• 刊名：Microsystem Technologies
• 出版年：2014
• 出版时间：April 2014
• 年：2014
• 卷：20
• 期：4-5
• 页码：559-569
• 全文大小：2,421 KB
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• 作者单位：Hutomo Suryo Wasisto (1)
  Qing Zhang (1)
  Stephan Merzsch (1)
  Andreas Waag (1)
  Erwin Peiner (1)
  
  1. Institute of Semiconductor Technology (IHT), Braunschweig University of Technology, Hans-Sommer-Stra?e 66, 38106, Brunswick, Germany
  
• ISSN：1432-1858

文摘

A closed-loop circuit is developed in this work for tracking the resonant frequency of silicon microcantilever mass sensors. The proposed closed-loop system is mainly based on a phase-locked loop (PLL) circuit. To lock onto the resonant frequency of the resonator, an actuation signal generated from a voltage-controlled oscillator is fed back to the input reference signal of the cantilever sensor. In addition to the PLL circuit, an instrumentation amplifier and an active low-pass filter are connected to the system for gaining the cantilever output signal and transforming a rectangular PLL output signal into a sinusoidal signal used for sensor actuation, respectively. To demonstrate the functionality of the system, a self-sensing silicon cantilever resonator with a built-in piezoresistive Wheatstone bridge is fabricated and integrated with the circuit. A piezoactuator is employed to actuate the cantilever into resonance. From the measurement results, the integrated closed-loop system is successfully employed to characterize a 9.4?kHz cantilever sensor under ambient temperature cross-sensitivity yielding a sensor temperature coefficient of ?2.8?ppm/°C. In addition to it, the sensor was also exposed to exhaled human breath condensates and e-cigarette aerosols to test the sensor sensitivity obtained from mass-loading effects. With a high frequency stability (i.e., a frequency deviation as low as 0.02?Hz), this developed system is intended to support the miniaturization of the instrumentation modules for cantilever-based nanoparticle detectors (CANTORs).