Narrowband microwave microelectromechanical switch on gallium arsenide substrates for operation in a frequency band of 10–12 GHz

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• 作者：P. P. Mal’tsev ; M. V. Maitama ; A. Yu. Pavlov ; N. V. Shchavruk
• 关键词：microelectromechanical system (MEMS) ; microwave switch ; MEMS switch calculation ; gallium arsenide
• 刊名：Russian Microelectronics
• 出版年：2016
• 出版时间：December 2016
• 年：2016
• 卷：45
• 期：7
• 页码：516-521
• 全文大小：
• 刊物类别：Engineering
• 刊物主题：Electrical Engineering;
• 出版者：Pleiades Publishing
• ISSN：1608-3415
• 卷排序：45

文摘

Discrete electrostatic microwave microelectromechanical switches on gallium arsenide wafers are designed and fabricated. The possibility of integrating the switches in one circuit with monolithic integrated circuits of transreceiving devices fabricated in one production cycle is estimated.