文摘
(1 − x)Na0.5Bi0.5TiO3–xBaTiO3 (BNT–xBT) thin films with x = 0, 0.04, 0.06, 0.08 were prepared on Pt(111)/Ti/SiO2/Si substrates via water-based sol–gel method. A new crystallization process called stepwise crystallization was used to obtain pure perovskite phase observed by XRD. Piezoelectric property and ferroelectric property of BNT–xBT thin films are investigated, and BNT–BT0.06 shows best piezoelectric and ferroelectric properties among the different compositions. The maximum strain value of 1.4–1.8 % and d33 of 83 pm/V are observed for BNT–BT0.06 thin films. AFM and PFM images reveal the dense morphology and large piezoresponse of BNT–BT thin films without orientation.