Simultaneous and independent adaptive correction of spherical and chromatic aberration using an electron mirror and lens combination
- 作者：J.P.S. Fitzgerald ; fit@pdx.edu ; R.C. Word ; R. Kö ; nenkamp
- 关键词：Electron optics ; Aberration correction ; Electron mirror ; Spherical aberration ; Chromatic aberration ; Cc ; Cs
- 刊名：Ultramicroscopy
- 出版年：2012
- 期刊代码：79_03043991
- 类别：ph
- 出版时间：April, 2012
- 卷：115
- 期：Complete
- 页码：35-40
- 文件大小：782 K
摘要
We present a theoretical analysis of an electrostatic triode mirror combined with an einzel lens for the correction of spherical and chromatic aberration. We show that this device adaptively corrects spherical and chromatic aberration simultaneously and independently. Chromatic aberration can be compensated over a relative range of 鈭?8%to +100%, and spherical aberration over 卤100%range. We compare the analytic calculation with a numerical simulation and show that the two descriptions agree to within 5%in the relevant operating regime of the device.