XRD and EXAFS studies of HfOub>2 ub> crystallisation in SiOub>2 ub>–HfOub>2 ub> films
- 作者：N.D. Afify ; G. Dalba ; U. Mahendra Kumar Koppolu ; C. Armellini ; Y. Jestin ; F. Rocca
- 关键词：High-none ; color ; black" href="/science?_ob=MathURL&_method=retrieve&_udi=B6VPK-4MCWMJP-4&_mathId=mml28&_user=10&_cdi=6209&_rdoc=35&_acct=C000050221&_version=1&_userid=10&md5=d9ce890302de4cfbf79197e4176612b4" t
- 刊名：Materials Science in Semiconductor Processing
- 出版年：2006
- 期刊代码：65_13698001
- 类别：ms
- 出版时间：December 2006
- 卷：9
- 期：6
- 页码：1043-1048
- 文件大小：281 K
摘要
This paper reports a detailed structural study on the nucleation of t-ack" href="/science?_ob=MathURL&_method=retrieve&_udi=B6VPK-4MCWMJP-4&_mathId=mml22&_user=10&_cdi=6209&_rdoc=35&_acct=C000050221&_version=1&_userid=10&md5=9f0a0e64c818a33b33d606eae4ff437c" title="Click to view the MathML source">HfOub>2 ub> nanocrystals in thin films of ack" href="/science?_ob=MathURL&_method=retrieve&_udi=B6VPK-4MCWMJP-4&_mathId=mml23&_user=10&_cdi=6209&_rdoc=35&_acct=C000050221&_version=1&_userid=10&md5=02808b02fb48ecb9740bc329660a21df" title="Click to view the MathML source">70SiOub>2 ub>–30HfOub>2 ub> prepared by sol–gel route on v-ack" href="/science?_ob=MathURL&_method=retrieve&_udi=B6VPK-4MCWMJP-4&_mathId=mml24&_user=10&_cdi=6209&_rdoc=35&_acct=C000050221&_version=1&_userid=10&md5=bbc245cda63d7cd3e306687e3b8bbf0a" title="Click to view the MathML source">SiOub>2 ub> substrates. Thermal treatment was performed at different temperatures ranging from 900 to 1200 °C for short (30 min) or long (24 h) time periods. Crystallisation and microstructure evolutions were traced by X-ray diffraction (XRD). The local structure around hafnium ions was determined from Hf ack" href="/science?_ob=MathURL&_method=retrieve&_udi=B6VPK-4MCWMJP-4&_mathId=mml25&_user=10&_cdi=6209&_rdoc=35&_acct=C000050221&_version=1&_userid=10&md5=da851326c687429844104243563225f0" title="Click to view the MathML source">Lub>3 ub>-edge extended X-ray absorption fine structure (EXAFS) measurements carried out at the BM08-GILDA Beamline of ESRF (France). XRD shows the nucleation of ack" href="/science?_ob=MathURL&_method=retrieve&_udi=B6VPK-4MCWMJP-4&_mathId=mml26&_user=10&_cdi=6209&_rdoc=35&_acct=C000050221&_version=1&_userid=10&md5=ebd4c2aa395f7678eb47e1d0e5bda569" title="Click to view the MathML source">HfOub>2 ub> nanocrystals in the tetragonal phase after heat treatment at 1000 °C for 30 min, and a partial phase transformation to the monoclinic phase (m-ack" href="/science?_ob=MathURL&_method=retrieve&_udi=B6VPK-4MCWMJP-4&_mathId=mml27&_user=10&_cdi=6209&_rdoc=35&_acct=C000050221&_version=1&_userid=10&md5=e650ac1f3ab0a154db02566b662e2a49" title="Click to view the MathML source">HfOub>2 ub>) starts after heat treatment at 1200 °C for 30 min. The lattice parameters as well as the average crystallites size and their distributions were determined as a function of the heat treatment. EXAFS results are in agreement with the XRD ones, with hafnium ions in the film heat treated at 1100 °C for 24 h are present in mixed phases.