Geometrical considerations for the design of liquid-phase biochemical sensors using a cantilever's fundamental in-plane mode

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• 作者：L.A. Beardslee^a ; ^{beardsl@mail.amc.edu}  ; [Author Vitae] ; F. Josse^b  ; [Author Vitae] ; S.M. Heinrich^c  ; [Author Vitae] ; I. Dufour^d  ; [Author Vitae] ; O. Brand^a  ; [Author Vitae]
• 关键词：Liquid-phase ; Cantilevers ; Bio-chemical sensors
• 刊名：Sensors and Actuators B ; Chemical
• 出版年：2012
• 期刊代码：161_09254005
• 类别：et
• 出版时间：31 March, 2012
• 卷：164
• 期：1
• 页码：7-14
• 文件大小：901 K

摘要

The influence of the beam geometry on the quality factor and resonance frequency of resonant silicon cantilever beams vibrating in their fundamental in-plane flexural mode in water has been investigated. Compared to cantilevers vibrating in their first out-of-plane flexural mode, utilizing the in-plane mode results in reduced damping and reduced mass loading by the surrounding fluid. Quality factors as high as 86 have been measured in water for cantilevers with a 20 渭m thick silicon layer. Based on the experimental data, design guidelines are established for beam dimensions that ensure maximal Q-factors and minimal mass loading by the surrounding fluid, thus improving the limit-of-detection of mass-sensitive biochemical sensors. Elementary theory is also presented to help explain the observed trends. Additional discussion focuses on the tradeoffs that exist in designing liquid-phase biochemical sensors using in-plane cantilevers.