As-deposited AZO films showed X-ray diffraction peaks corresponding to ZnO (002) and Au (111) planes and those peak intensities increased with post-deposition vacuum annealing. The optical and electrical properties of the films were strongly influenced by post-deposition annealing. Although the optical transmittance of the films deteriorated with an Au interlayer, as-deposited ZAZ films showed a low resistivity of 2.0聽脳聽10鈭?聽惟聽cm, and the films annealed at 300聽掳C had a lower resistivity of 9.8聽脳聽10鈭?聽惟聽cm. The work function of the films increased with annealing temperature, and the films annealed at 300聽掳C had a higher work function of 4.1聽eV than the films annealed at 150聽掳C. The experimental results indicate that vacuum-annealed ZAZ films are attractive candidates for use as transparent electrodes in large area electronic applications such as solar cells and large area displays.