Numerical and analytical approximations to large post-buckling deformation of MEMS

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• 作者：Yongping Yu^a ; Baisheng Wu^b ; C.W. Lim^c ; ^{bccwlim@cityu.edu.hk}
• 关键词：Large post-buckling deformation ; Analytical approximation ; MEMS ; Linearization
• 刊名：International Journal of Mechanical Sciences
• 出版年：2012
• 期刊代码：85_00207403
• 类别：et
• 出版时间：February, 2012
• 卷：55
• 期：1
• 页码：95-103
• 文件大小：403 K

摘要

This paper analyzes the electromechanical post-buckling response of an axially stressed clamped-clamped beam actuator subjected to a symmetric electrostatic field. Numerical solutions of the nonlinear integral-differential governing equation are first obtained by constructing the extended systems and applying the shooting method. The corresponding analytical approximate solutions are then established by combining Newton's linearization with Galerkin's method. In contrast to the classical Galerkin's method, the linearization is performed prior to its application. This yields a set of linear algebraic equations instead of nonlinear algebraic equations, and hence analytical approximate solutions are established. These analytical approximate solutions show excellent agreement with numerical solutions from the shooting method, and they are valid for a wide range of beam-center deflection. The analytical approximate method presented here is simple in principle and it is easy to be implemented with the help of any symbolic computational software.